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Algebraic Multigrid for Industrial Semiconductor Device Simulation

  • Tanja Clees
  • Klaus Stüben
Conference paper
Part of the Lecture Notes in Computational Science and Engineering book series (LNCSE, volume 35)

Abstract

In this paper, strategies for solving systems of partial differential equations by algebraic multigrid are discussed. In particular, a general framework for so-called point-based approaches is outlined. Several applications from industrial semiconductor process and device simulation have been investigated, and detailed results for two industrially relevant devices are presented. It is shown that this framework allows to construct robust and fast algebraic multigrid approaches even for cases, where iterative one-level solvers of the type commonly used in such applications exhibit bad convergence or even fail.

Keywords

Multigrid Method Device Simulation Doping Profile Primary Matrix Concrete Choice 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2003

Authors and Affiliations

  • Tanja Clees
    • 1
  • Klaus Stüben
    • 1
  1. 1.Fraunhofer SCAISchloss BirlinghovenSt. AugustinGermany

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