Micromixer Module With an Integrated Optical Pressure Gauge

  • T. Pfeifer
  • Ubaldo Aleriano
Conference paper
Part of the VDI-Buch book series (VDI-BUCH)

Abstract

This paper presents the concept of a micromixer module for the laminar flow regime with an integrated fiber-optic based distance sensor used to gauge the pressure. The micromixer is made up from a glass-/silicon-/glass-plate sandwich. The inner silicon plate is etched from both sides to achieve a distributive fluid mixing. A diaphragm is then etched in one of these sides, in such a way that one of its faces is exposed to the pressure of the fluid. This pressure forces act on a large area and reach to bend the diaphragm. The deflection can be sensed by an optical displacement sensor and finally the pressure is calculated.

Keywords

Partial Flow Silicon Plate Computer Fluid Dynamics Grin Lens Inlet Liquid 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Copyright information

© Springer-Verlag Berlin Heidelberg 2004

Authors and Affiliations

  • T. Pfeifer
    • 1
  • Ubaldo Aleriano
    • 1
  1. 1.Laboratory for Machine Tools and Production TechnologyAachen University of TechnologyAachenGermany

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