Laser Precision Microfabrication pp 189-213

Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 135) | Cite as

Ultrafast Laser Micro- and Nanostructuring

Chapter

Abstract

Near-threshold non-linear nanoscale processing phenomena generated by sub-100fs laser pulses are reviewed. Coupled with high NA focusing optics, high power oscillators demonstrated a high-repetition rate approach for the precise laser machining of dielectrics on a submicrometer scale. A new field of nanostructuring proposed on the basis of apertureless scanning near-field optical nanomachining and examples of femtosecond nanosurgery are discussed.

Abbreviations

a

Absorbed fraction of incident laser light

α

Absorptivity

d0

Beam diameter

w0

Beam radius

ρ

Density

Γ

Electron–phonon coupling constant

τe–p

Electron–phonon relaxation time

δ

Film thickness

F

Fluence

Ce;l

Heat capacity (electron, lattice)

ke;l

Heat conductivity (electron, lattice)

β(I)

Impact ionisation rate

ξ

Incubation factor

I

Intensity

Q

Laser source term

d0

Mean distance between two defects

N

Number of applied pulses

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Authors and Affiliations

  1. 1.Department of Physical ChemistryUniversity of ViennaViennaAustria

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