A Wonderful World of Holography, Interferometry, and Optical Testing

Chapter

This paper will briefly describe four projects I have especially enjoyed being involved with during my career. 1) Use of computer generated holograms for testing aspheric optics, 2) phase-shifting interferometry, 3) computerized interference microscope, and 4) dynamic (single-shot) interferometry.

Keywords

Test Beam Fringe Contrast Phase Filter Polarizer Element Wavefront Error 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    A. W. Lohmann and D. P. Paris, Appl. Opt. 6, 1739 (1967).CrossRefGoogle Scholar
  2. 2.
    A. J. MacGovern and J. C. Wyant, Appl. Opt. 10, 619, (1971).CrossRefGoogle Scholar
  3. 3.
    J. C. Wyant and V. P. Bennett, Appl. Opt. 11, 2833, (1972).CrossRefGoogle Scholar
  4. 4.
    Y.-C. Chang and J. H. Burge, SPIE Proc. Vol. 3782, 358, (1999).CrossRefGoogle Scholar
  5. 5.
    J. C. Wyant and P. K. O’Neill, Appl. Opt. 13, 2762, (1974).CrossRefGoogle Scholar
  6. 6.
    Mathias Beyerlein, Norbert Lindlein, and Johannes Schwider, Appl. Opt. 41, 2440, (2002).CrossRefGoogle Scholar
  7. 7.
    Stephan Reichelt, Christof Pruss, and Hans J. Tiziani, Appl. Opt. 42, 4468, (2003).CrossRefGoogle Scholar
  8. 8.
    Steven M. Arnold and Robert Kestner, Proc. SPIE 2536, 117, (1995).CrossRefGoogle Scholar
  9. 9.
    J. C. Wyant, "Use of an ac heterodyne lateral shear interferometer with real-time wavefront corrections systems," Appl. Opt. 14 (11): 2622-2626, Nov. 1975.Google Scholar
  10. 10.
    B. Bhushan, J.C. Wyant and C.L. Koliopoulos, "Measurement of surface topography of magnetic tapes by Mirau interferometry", Appl. Opt., 28:1489-1497, 1985.CrossRefGoogle Scholar
  11. 11.
    J.C. Wyant, "Optical profilers for surface roughness", Proceedings of the Society of Photo-Optical Instrumentation Engineers, 525, 174-180, 1985.Google Scholar
  12. 12.
    J. C. Wyant and K. Creath, "Advances in Interferometric Optical Profiling," Int. J. Mach. Tools Manufact. Vol. 32, No.1/2, 5-10(1992).CrossRefGoogle Scholar
  13. 13.
    U.S. Patent No. 4,832,489 "Two-wavelength phase-shifting interferometer and method," James C. Wyant and K. Creath, 1989.Google Scholar
  14. 14.
    M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, "An Application of Interference Microscopy to Integrated Circuit Inspection and Metrology," Proc. SPIE, 775, 233-247 (1987).Google Scholar
  15. 15.
    T. Dresel, G. Hausler, and H. Venzke, "Three-dimensional sensing of rough surfaces by coherence radar," Appl. Opt. 31(7):919-3925, March 1992.Google Scholar
  16. 16.
    P. J. Caber, "An Interferometric Profiler for Rough Surfaces," Appl. Opt. 32(19):3438-3441, July 1993.Google Scholar
  17. 17.
    S. Suja Helen, M.P. Kothiyal, and R.S. Sirohi, "Achromatic phase-shifting by a rotating polarizer", Opt. Comm. 154, 249 (1998).CrossRefGoogle Scholar
  18. 18.
    Neal Brock, John Hayes, Brad Kimbrough, James Millerd, Michael North-Morris, Matt Novak and James C. Wyant, “Dynamic Interferometry,” Proc. SPIE 5875, 58750F-1, (2005).Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2009

Authors and Affiliations

  1. 1.College of Optical SciencesUniversity of ArizonaTucsonUSA

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