Wireless Interrogation of a Micropump and Analysis of Corrugated Micro-diaphragms

  • Don W. Dissanayake
  • Said F. Al-Sarawi
  • Derek Abbott
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 49)


In this chapter, Surface Acoustic Wave (SAW) device based wirelessly operated, batteryless and low-powered microdiaphragm structure is investigated. These diaphragms are intended to establish the actuation mechanism for micropumps and similar flow control devices. The actuation method of the diaphragm relies on the electrostatic coupling between the diaphragm and the output Inter Digital Transducer (IDT) of the SAW device. The theory governing the SAW device based novel actuation mechanism is elaborated. A Finite Element Model (FEM) is developed and analysed using ANSYS tools. Different design methods are considered to enhance the deflection of the diaphragm for a low control voltage. As such, inclusion of different types of corrugations, and selection of different bio-compatible materials for various sections of the diaphragm are analysed. Deflection of the diaphragm is obtained as a function of the electric potential at the output IDT of the SAW device and compared with results obtained from published research. Corrugation types such as pure sinusoidal, arc sinusoidal and toroidal types are included in the analysis. Effective meshing requirements that are specific to the presented model are considered and a mesh is developed to achieve converged results. Results show that the use of corrugations around a square-shaped diaphragm with carefully chosen materials results in better performance than that of a flat diaphragm.


MEMS SAW device Wireless Electrostatic Diaphragm ANSYS FEA 


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  1. 1.
    Tsai, N.C., Sue, C.Y.: Review of MEMS-based drug delivery and dosing systems. Sensors and Actuators A 134, 555–564 (2007)CrossRefGoogle Scholar
  2. 2.
    Ke, F., Miao, J., Wang, Z.: A wafer-scale encapsulated RF MEMS switch with a stress-reduced corrugated diaphragm. Sensors and Actuators A: Physical 151(2), 237–243 (2009)CrossRefGoogle Scholar
  3. 3.
    Wang, W.J., Lin, R.M., Ren, Y., Li, X.X.: Performance of a novel non-planer diaphragm for high-sensitivity structures. Microelectronics Journal 34(9), 791–796 (2003)CrossRefGoogle Scholar
  4. 4.
    Giovanni, M.D.: Flat and Corrugated Diaphragm Design Handbook, 2nd edn. Marcel Dekker Inc., New York (1982)Google Scholar
  5. 5.
    Wang, Y.-G., Shi, J.-L., Wang, X.-Z.: Large amplitude vibration of heated corrugated circular plates with shallow sinusoidal corrugations. Sensors and Actuators A: Physical (in Press), Corrected Proof:1–10 (November 2008)Google Scholar
  6. 6.
    Butt, O.I., Carruth, R., Kutala, V.K., Kuppusamy, P., Moldovan, N.I.: Stimulation of peri-implant vascularization with bone marrow-derived progenitor cells: monitoring by in vivo EPR oximetry. Tissue Engineering 13(8), 2053–2061 (2007)CrossRefGoogle Scholar
  7. 7.
    Jones, I., Ricciardi, L., Hall, L., Hansen, H., Varadan, V., Bertram, C., Maddocks, S., Enderling, S., Saint, D., Al-Sarawi, S., Abbott, D.: Wireless RF communication in biomedical applications. Smart Materials and Structures 17(015050), 1–10 (2008)Google Scholar
  8. 8.
    Nguyen, N.T., Huang, X., Chuan, T.K.: MEMS-Micropumps: A review. Transactions of the ASME Journal of Fluids Engineering 124, 384–392 (2002)CrossRefGoogle Scholar
  9. 9.
    Hamsch, M.: An Interrogation Unit for Passive Wireless SAW Sensors Based on Fourier Transform. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 51, 1449–1455 (2004)CrossRefGoogle Scholar
  10. 10.
    Cui, Q., Liu, C., Zha, X.F.: Simulation and optimization of a piezoelectric micropump for medical applications. The International Journal of Advanced Manufacturing Technology 36(5), 516–524 (2008)CrossRefGoogle Scholar
  11. 11.
    Lee, B., Kim, E.S.: Analysis of partly-corrugated rectangular diaphragms using the Rayleigh-Ritz method. Journal of Microelectromechanical Systems 9(3), 399–406 (2000)CrossRefGoogle Scholar
  12. 12.
    Horenstein, M.N., Perreault, J.A., Bifano, T.G.: Differential capacitive position sensor for planar MEMS structures with vertical motion. Sensors and Actuators 80, 53–61 (2000)CrossRefGoogle Scholar
  13. 13.
    Gantner, A., Hoppe, R.H.W., Köster, D., Siebert, K.G., Wixforth, A.: Numerical simulation of piezoelectrically agitated surface acoustic waves on microfluidic biochips (2005) (visited on, 25/06/2007)Google Scholar
  14. 14.
    Dissanayake, D.W., Al-Sarawi, S., Abbott, D.: Corrugated micro-diaphragm analysis for low-powered and wireless Bio-MEMS. In: 3rd International Conference on Sensing Technology, November 2008, pp. 125–129 (2008); Available in IEEE Explore, ISBN: 978–1–4244–2176–3Google Scholar
  15. 15.
    Dissanayake, D.W., Al-Sarawi, S., Abbott, D.: Surface acoustic wave device based electrostatic actuator for microfluidic applications. In: 2nd International Conference on Sensing Technology, November 2007, pp. 381–386 (2007)Google Scholar
  16. 16.
    Dissanayake, D.W., Al-Sarawi, S.F., Abbott, D.: Electrostatic micro actuator design using surface acoustic wave devices. In: Smart Sensors and Sensing Technology. LNEE, vol. 20, pp. 139–151. Springer, Heidelberg (2008)CrossRefGoogle Scholar
  17. 17.
    Bao, M.-H.: Basic mechanics of beams and diaphragm structures. In: Micro mechanical transducers: pressure sensors, accelerometers, and gyroscopes (Hand Book of Sensors and Actators), vol. 8, pp. 23–87. Elsevier, New York (2000)CrossRefGoogle Scholar
  18. 18.
    ANSYS Incorporation, (visited on, 17/02/2009)
  19. 19.
    Nisar, A., Afzulpurkar, N., Mahaisavariya, B., Tuantranont, A.: Multifield analysis using multiple code coupling of a MEMS based micropump with biocompatible membrane materials for biomedical applications. In: International Conference on BioMedical Engineering and Informatics, March 2008, vol. 1, pp. 531–535 (2008)Google Scholar
  20. 20.
    Lakshmininarayana, H.: Finite Elements Analysis: Procedures in Engineering. Orient Blackswan (2004)Google Scholar
  21. 21.
    HD MicroSystems, Parlin, NJ. PI-2600 LX series, low stress polyimides, Product information and process guidelines (April 2008)Google Scholar
  22. 22.
    Kazaryan, A.A.: Thin-film capacitive pressure transducers which operate during the deformation of products. Measurement Techniques 43(1), 38–43 (2000)CrossRefGoogle Scholar
  23. 23.
    Gad-el-Hak, M.: The MEMS Handbook. CRC Press, New York (2002)zbMATHGoogle Scholar
  24. 24.
    Füldner, M., Dehé, A., Lerch, R.: Analytical Analysis and Finite Element Simulation of Advanced Membranes for Silicon Microphones. IEEE Sensors Journal 5(5), 857–863 (2005)CrossRefGoogle Scholar
  25. 25.
    Dissanayake, D.W., Al-Sarawi, S., Lu, T.-F., Abbott, D.: Design and characterisation of micro-diaphragm for low power drug delivery applications. In: Proc. of SPIE–Active and Passive Smart Structures and Integrated Systems, April 2008, vol. 6928, Article 69282, pp. 1–8 (2008)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2009

Authors and Affiliations

  • Don W. Dissanayake
    • 1
  • Said F. Al-Sarawi
    • 1
  • Derek Abbott
    • 2
  1. 1.Centre for High Performance Integrated Technologies and Systems (CHiPTec), School of Electrical and Electronic EngineeringUniversity of AdelaideAustralia
  2. 2.Centre for Biomedical Engineering (CBME), School of Electrical and Electronic EngineeringUniversity of AdelaideAustralia

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