Quantification and Segmentation of Electron Tomography Data- Exemplified at ErSi2 Nanocrystals in SiC
Conference paper
Abstract
Small transition metal crystals embedded in a semiconducting matrix are nanostructured systems with potential applications in nanotechnology. As their size distribution plays a key role for the detailed understanding of the device properties, the precise three-dimensional quantification is a must. However, the quantification process of the observed three-dimensional object is still under big discussion [1], due to subjective (manual) segmentation and desired ease of data-processing. However, before application related questions can be addressed, the nanocrystal formation as well as basic questions in the field of quantification have to be answered and robustly solved.
Keywords
electron tomography nanocrystals in SiC quantification segmentationReferences
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