The transport phenomena based on particle theories are discussed. Different models for electron, photon, and phonon transport are outlined and the corresponding time- and length-scales are introduced. The derivations for the Boltzmann transport equation, the electron-beam transport equations, the radiative transfer equation, the Fourier and the two-temperature conduction equations, and finally the electron-phonon hydrodynamic equations are given. Two flowcharts are provided to help the reader to choose an appropriate transport model and formulate a numerical modeling scheme for different micro/nanomachining applications.
Keywords
Monte Carlo Transport Equation Optical Phonon Energy Carrier Acoustic Phonon
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© Springer-Verlag Berlin Heidelberg 2008