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Microelectrode Fabrication Using Indium Tin Oxide (ITO) For Microfluidic Devices Employing Dielectrophoresis

  • Nahrizul Adib KadriEmail author
  • K. F. Hoettges
  • M. P. Hughes
Part of the IFMBE Proceedings book series (IFMBE, volume 21)

Abstract

Dielectrophoresis (DEP) has been widely employed as one of the techniques in developing various micro-electromechanical systems (MEMS). The manipulation of particles using DEP forces is dependent upon the particles’ dipole moment that is produced in the presence of an electric field gradient. The paper documents the fabrication processes employed at the University of Surrey in developing the microelectrodes to be used in generating the said field gradient.

Keywords

Microelectrode indium tin oxide dielectrophoresis lab on a chip 

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Copyright information

© Springer-Verlag Berlin Heidelberg 2008

Authors and Affiliations

  • Nahrizul Adib Kadri
    • 1
    Email author
  • K. F. Hoettges
    • 1
  • M. P. Hughes
    • 1
  1. 1.Centre of Biomedical EngineeringUniversity of SurreyGuildford, SurreyUK

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