Photoacoustic and Photothermal Phenomena III pp 326-330 | Cite as
Some Applications of SAW Pulses Photogenerated in Silicon
Conference paper
Abstract
Surface acoustic waves (SAWs) in silicon wafers have been generated by Nd:YAG or Er:YAG laser irradiation via surface ablation as well as evaporation of a thin water layer. A probe beam deflection technique was employed to record surface acoustic waveforms. High surface accelerations caused by laser-induced SAW pulses were found to lead to removal of micron-size dust particles from the surface. The phonon focusing of the SAW, propagating from a point photoacoustic source was examined using both laser probe measurements and a new visualization technique based on SAW-induced dust removal.
Keywords
Silicon Wafer Dust Particle Surface Acoustic Wave Bulk Acoustic Wave Surface Ablation
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© Springer-Verlag Berlin Heidelberg 1992