Laser Beam Deflection as a Probe of Laser Ablation of Materials

  • J. A. Sell
  • D. M. Heffelfinger
  • P. Ventzek
  • R. M. Gilgenbach
Conference paper
Part of the Springer Series in Optical Sciences book series (SSOS, volume 62)

Abstract

Probe beam deflection is used for identification of the laser fluence threshold for excimer laser photoablation of various materials. The beam deflection signal due to an acoustic wave and a thermal wave are both distorted as the excimer laser beam fluence is raised through the ablation threshold.

Keywords

Excimer Laser Probe Beam Thermal Wave Acoustic Pulse Ablation Threshold 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1990

Authors and Affiliations

  • J. A. Sell
    • 1
  • D. M. Heffelfinger
    • 1
  • P. Ventzek
    • 2
  • R. M. Gilgenbach
    • 2
  1. 1.Physics DepartmentGeneral Motors Research LaboratoriesWarrenUSA
  2. 2.Intense Energy Beam Interaction Laboratory, Nuclear Engineering DepartmentUniversity of MichiganAnn ArborUSA

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