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Ellipsometry

  • Mathias Schubert
Chapter
Part of the Springer Tracts in Modern Physics book series (STMP, volume 209)

Abstract

Ellipsometry, in general, determines the complex ratio ρ of linearly independent electric feld components of polarized electromagnetic plane waves. More specific, the change of the polarization state of an electromagnetic plane wave upon interaction with a sample is addressed thereby. Explicitly, for a given mode description in terms of, e.g., p and s polarized fields (amplitudes A stand for incident, B for exiting waves. Figure 2.1)1

Keywords

Dielectric Function Spectroscopic Ellipsometry Electromagnetic Plane Wave Mueller Matrix Ellipsometric Parameter 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Authors and Affiliations

  • Mathias Schubert
    • 1
  1. 1.Institut für Experimentelle Physik IIUniversität LeipzigLeipzigGermany

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