Advertisement

3D Nano Capacitors Using Electrodeposited Nickel Nanowires in Porous Anodic Alumina Template

  • Alison E. ViegasEmail author
  • Sudipta Dutta
  • S. Rekha
  • M. S. Bobji
  • Srinivasan Raghavan
  • Navakanta Bhat
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)

Abstract

We report the fabrication and characterization of a new design of 3D nano Capacitors using Alumina nanopores as the dielectric material. Nickel nanowires grown inside the nanopores act as high surface area electrodes. These wires are combined together in the form interdigitated capacitor structure, to achieve very high capacitance density.

References

  1. 1.
    V. Lehmann, A novel capacitor technology based on porous silicon. Thin Solid Films 276, 138–142 (1996). ElsevierADSCrossRefGoogle Scholar
  2. 2.
    J.H. Klootwijk, Ultrahigh capacitance density for multiple ALD-grown MIM capacitor stack in 3-D silicon. IEEE Electron Device Lett. 29(7), 740–742 (2008)ADSCrossRefGoogle Scholar
  3. 3.
    V.F.G. Tseng, H. Xie, Design and fabrication of high density multilayer metal—insulator—metal capacitor based on selective etching. J. Micromech. Microeng. 23(3), 035025ADSCrossRefGoogle Scholar
  4. 4.
    V.F.G. Tseng, Increased multilayer fabrication and RF characterization of a high density stacked MIM capacitor based on selective etching. IEEE Trans. Electron Devices 61(7), 2302–2308 (2014)CrossRefGoogle Scholar
  5. 5.
    K.B. Shelimov, Template—grown high density nano capacitor arrays. Appl. Phys. Lett. 1722–1724 (2000), by American Institute of PhysicsGoogle Scholar
  6. 6.
    J.I. Sohn, Fabrication of high density arrays of individually isolated nanocapacitors using aluminum oxide templates and carbon nanotubes. Appl. Phys. Lett. 123115-2–123115-3 (2005), by American Institute of PhysicsGoogle Scholar
  7. 7.
    P. Banerjee, Nanotubular metal—insulator—metal capacitor arrays for energy storage. Nat. Nanotechnol. 1–5 (2009), by Macmillan Publishers LimitedGoogle Scholar
  8. 8.
    A. Yadav, Porous alumina based ordered nanocomposites coating for wear resistance. Mater. Res. Express 1–7 (2016), by IOP Publishing Ltd.Google Scholar
  9. 9.
    Sudipta Dutta, Ph.D. dissertation, Indian Institute of Science (2018)Google Scholar

Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Alison E. Viegas
    • 1
    • 2
    Email author
  • Sudipta Dutta
    • 1
  • S. Rekha
    • 2
  • M. S. Bobji
    • 1
  • Srinivasan Raghavan
    • 1
  • Navakanta Bhat
    • 1
  1. 1.Indian Institute of ScienceBengaluruIndia
  2. 2.National Institute of Technology KarnatakaSurathkalIndia

Personalised recommendations