Advertisement

Effect of Argon Plasma Treatment on Ohmic Contact Formation in AlGaN/GaN HEMTs

  • Sonalee KapoorEmail author
  • Robert Laishram
  • Hemant Saini
  • Somna Mahajan
  • Rupesh Kumar Chaubey
  • D. S. Rawal
  • Seeema Vinayak
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)

Abstract

GaN/AlGaN based High Electron Mobility Transistors (HEMTs) are being widely developed and used for variety of microwave power applications due to their superior electron transport properties. In the present study, effect of HCl pre-metal dip followed by low power Argon (Ar) plasma exposure for fixed time is studied, during HEMT fabrication, and reported. The electrical characterization of the source/drain ohmic contacts is carried out using circular Transmission Line Model (c-TLM) method. The surface morphology and the structural analysis of the contacts are evaluated using XRD, SEM, AFM and SIMS. Ti/Al based metal systems displayed lower contact resistance and increase in device current values Ids when exposed to Ar plasma. The improvement of Rc values is correlated to lowering of barrier height as indicated by XPS analysis. This is mainly due to preferential sputtering of N during Ar plasma treatment that creates N vacancies on GaN surface increasing surface doping concentration suitable for ohmic contacts. Hence Ar plasma treatment along with HCl pre-metal dip facilitates achieving lower contact resistance of ohmic contacts.

Keywords

GaN Ohmic Ar plasma HEMT TLM 

References

  1. 1.
    I. Akasaki, J. Cryst, Growth 300, 2 (2007)CrossRefGoogle Scholar
  2. 2.
    S. Nakamura, T. Mukai, M. Senoh, Jpn. J. Appl. Phys. 30, L1998 (1991)ADSCrossRefGoogle Scholar
  3. 3.
    M. Asif Khan, Q. Chen, M.S. Shur, B.T. Dermott, J.A. Higgins, J. Burm, W.J. Schaff, L.F. Eastman, Solid State Electron. 41, 1555 (1997)ADSCrossRefGoogle Scholar
  4. 4.
    R.J. Trew, M.W. Shin, V. Gatto, Solid Stat. Electron. 41, 1561 (1997)ADSCrossRefGoogle Scholar
  5. 5.
    T.P. Chow, R. Tyagi, IEEE Trans. Electron Devices 41, 1481 (1994)ADSCrossRefGoogle Scholar
  6. 6.
    A.A. Allerman, M.H. Crawford, A.J. Fischer, K.H.A. Bogart, S.R. Lee, D.M. Follstaedt, P.P. Provencio, D.D. Koleske, J. Cryst. Growth 272, 227 (2005)ADSCrossRefGoogle Scholar
  7. 7.
    B. Shen, H.M. Zhou, J. Liu, Y.G. Zhou, R. Zhang, Y. Shi, Y.D. Zeng, T. Someya, Y. Arakawa, Opt. Mater. 23, 197 (2003)ADSCrossRefGoogle Scholar
  8. 8.
    D. Qiao, Z.F. Guan, J. Carlton, S. Lau, G.J. Sullivan, Appl. Phys. Lett. 74, 2652 (1999)ADSCrossRefGoogle Scholar
  9. 9.
    S.T. Sheppard, K. Doverspike, W.L. Pribble, S.T. Allen, J.W. Palmour, L.T. Kehias, T.J. Jenkins, IEEE Electron Device Lett. 20, 161 (1999)ADSCrossRefGoogle Scholar
  10. 10.
    H.W. Jang, C.M. Jeon, J.K. Kim, J.L. Lee, Appl. Phys. Letts. 78, 2015 (2001)ADSCrossRefGoogle Scholar
  11. 11.
    N. Chaturvedi, U. Zeimer, J. Würfl, G. Tränkle, Semicond. Sci. Technol. 21, 175 (2006)ADSCrossRefGoogle Scholar
  12. 12.
    Z.F. Fan, S.N. Mohammad, W. Kim, A.E. Botchkarev, H. Morkoc, Appl. Phys. Lett. 68, 1672 (1996)ADSCrossRefGoogle Scholar
  13. 13.
    S. Ruvimov, Z. Liliental-Weber, J. Washburn, D. Qiao, S.S. Lau, P.K. Chu, Appl. Phys. Lett. 73, 2582 (1998)ADSCrossRefGoogle Scholar
  14. 14.
    A. Motayed, R. Bathe, M.C. Wood, O.S. Diouf, R.D. Vispute, S. Noor Mohammad, J. Appl. Lett. 93, 1087 (2003)Google Scholar
  15. 15.
    A.T. Ping, Q. Chen, J.W. Yang, M. Asif Khan, I. Adesida, J. Electron. Mater. 27, 261 (1998)Google Scholar
  16. 16.
    Y. Nakano, D. Ogawa, K. Nakamura, R. Kawakami, M. Niibe, J. Vac. Sci. Tech A 33(4), 043002-1 (2015)Google Scholar
  17. 17.
    X.A. Cao, H. Piao, S.F. LeBoeuf, J. Li, J.Y. Lin, H.X. Jiang Appl. Phys. Lett. 89, 082109-1 (2006)ADSCrossRefGoogle Scholar
  18. 18.
    C.C. Lee, C.P. Lee, M.H. Yeh, W.I. Lee, C.T. Kuo, J. Vac. Sci. Technol., B 21(4), 1501 (2003)CrossRefGoogle Scholar
  19. 19.
    R.J. Molnar, T. Lei, T.D. Moustakas, Appl. Phys. Lett. 62, 72 (1993)ADSCrossRefGoogle Scholar

Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Sonalee Kapoor
    • 1
    Email author
  • Robert Laishram
    • 1
  • Hemant Saini
    • 1
  • Somna Mahajan
    • 1
  • Rupesh Kumar Chaubey
    • 1
  • D. S. Rawal
    • 1
  • Seeema Vinayak
    • 1
  1. 1.New DelhiIndia

Personalised recommendations