Effect of Carbon Ion Implantation on a Bi-Layer Transparent Electrode

  • Priyanka Garg
  • Vikas SharmaEmail author
  • Surbhi
  • Satyavir Singh
  • K. Sachdev
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)


Present investigation reports the development and performance of transparent conducting electrode (TCE) having oxide-metal bilayer structure; ZnO/Ag deposited at 300 K and showing good electrical and optical properties. Low energetic ion implanted films show a variation of electrical properties; sheet resistance, carrier concentration and mobility under ion fluence variation implying tunability. A thin film of silver (8 nm) was deposited on a corning glass substrate using sputtering with a subsequent deposition of 60 nm ZnO layer. Carbon ion beam of energy 40 keV with different fluences was used to modify properties of the bilayer structure.



Authors are grateful for various fabrication and characterization facilities provided by Materials Research Centre (MRC) at MNIT Jaipur (INDIA) and LEIBF, Inter University Accelerator Centre (IUAC), New Delhi (INDIA).


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Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Priyanka Garg
    • 1
  • Vikas Sharma
    • 1
    • 2
    Email author
  • Surbhi
    • 1
  • Satyavir Singh
    • 1
  • K. Sachdev
    • 1
  1. 1.Malaviya National Institute of TechnologyJaipurIndia
  2. 2.Indian Institute of Technology DelhiHauz Khas, New DelhiIndia

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