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Effect of Residual Stress on Cantilever Type Push–Pull Capacitive Accelerometer Structure

  • Nidhi GuptaEmail author
  • Shaveta
  • Shankar Dutta
  • Ramjay Pal
  • Kapil Kumar Jain
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)

Abstract

This paper presents the effect of residual stress on the response of the capacitive push pull accelerometer structure. The effect of residual stresses on the structure was simulated by using finite element method (FEM) based software. A simple model is proposed to trim the offset of the accelerometer deflection due to the residual stress associated with various fabrication processes.

Notes

Acknowledgements

The Authors would like to thank Director SSPL for his kind permission to publish this paper.

References

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Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Nidhi Gupta
    • 1
    Email author
  • Shaveta
    • 1
  • Shankar Dutta
    • 1
  • Ramjay Pal
    • 1
  • Kapil Kumar Jain
    • 1
  1. 1.Solid State Physics Laboratory (DRDO)TimarpurIndia

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