Effect of Residual Stress on Cantilever Type Push–Pull Capacitive Accelerometer Structure
This paper presents the effect of residual stress on the response of the capacitive push pull accelerometer structure. The effect of residual stresses on the structure was simulated by using finite element method (FEM) based software. A simple model is proposed to trim the offset of the accelerometer deflection due to the residual stress associated with various fabrication processes.
The Authors would like to thank Director SSPL for his kind permission to publish this paper.
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