Textured Silicon Surface and Silicon Nanowires on Silicon Chip for Ammonia Sensing Application

  • Amit KumarEmail author
  • Daisy Verma
  • Hrishikesh Dhasmana
  • Vivek Kumar
  • Abhishek Verma
  • V. K. Jain
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)


A low cost, easily processable, highly stable and reproducible, room temperature ammonia gas sensors have been developed using textured silicon and silicon nanowires (SiNWs) on silicon chip as sensing element. The vertically-aligned rice-straw-like SiNWs have been fabricated on silicon chip using metal-assisted chemical etching (MACE) technique. The prepared SiNWs shows dense (37.5%) and well-oriented arrays having heights and diameters of nanowires ranging 4–5 and 50–200 nm, respectively. Ammonia sensing characteristics of the fabricated devices are recorded upon exposes to environment with ammonia molecules of different concentrations (40–100 ppm) at room temperature. The SiNWs based ammonia sensor show low noise and a high response (184%) for 100 ppm ammonia gas. The SiNW-array on silicon chip effectively increases the surface area and possesses good sensing properties and has the potential for mass production of sensing devices.



The authors are thankful to Dr. Ashok K. Chauhan, Founder President, Amity University, Noida for his continuous guidance and encouragement. The authors would also like to thank Dr. D. N. Singh from IndoSolar Pvt. Ltd., India for providing the silicon wafer to carry out the experiments.


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Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Amit Kumar
    • 1
    Email author
  • Daisy Verma
    • 2
  • Hrishikesh Dhasmana
    • 1
  • Vivek Kumar
    • 1
  • Abhishek Verma
    • 1
  • V. K. Jain
    • 1
  1. 1.Amity Institute for Advanced Research and Studies (Materials and Devices)Amity UniversityNoidaIndia
  2. 2.Shaheed Mangal Pandey Government Girls Post Graduate CollegeMadhavpuram, MeerutIndia

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