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Development of Silicon Based Microchannel for Gas Chromatograph Column

  • Renuka SaxenaEmail author
  • S. S. Lamba
  • Vinita Gond
  • M. Islam
  • Jitendra Kumar
  • Kapil Kumar Jain
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)

Abstract

The current study develop a MEMS–based micro-GC system incorporating a serpentine column with dimensions of 2 m × 200 µ × 115 µ (length × width × depth). The channel is etched into a silicon substrate with dimensions 28 × 28 mm2 using wet etching. The device is sealed by anodic bonding technique using Pyrex glass wafer. This fabrication method raises the possibility for a low cost mass production.

Notes

Acknowledgements

The authors would like to thanks The Director SSPL for giving opportunity to work in this area.

References

  1. 1.
    A. Bhushan, Fabrication of micro-gas chromatograph column for fast chromatography. J. Microsyst. Technol. 13, 36–368 (2007)Google Scholar
  2. 2.
    B.O. Edward, Hybrid integration of injector and detector function for microchip gas chromatography. Analyst 135, 2730–2736 (2010)CrossRefGoogle Scholar

Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Renuka Saxena
    • 1
    Email author
  • S. S. Lamba
    • 1
  • Vinita Gond
    • 1
  • M. Islam
    • 1
  • Jitendra Kumar
    • 1
  • Kapil Kumar Jain
    • 1
  1. 1.Solid State Physics LabTimarpurIndia

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