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Development of Barometric Pressure Sensor for Micro Air Vehicle Application

  • S. Santosh KumarEmail author
  • Amit Tanwar
  • B. D. Pant
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)

Abstract

This work describes the design and fabrication of a barometric pressure sensor for MAV application. The sensor has polysilicon piezoresistor and wet bulk micromachined diaphragm. The fabricated sensor shows good sensitivity of 34.78 mV/Bar at and an excellent non-linearity of <0.11%.

Notes

Acknowledgements

Authors would like to acknowledge the support of the Director, CSIR-CEERI, Pilani. The financial support by Council of Scientific and Industrial Research through ESC-107 is gratefully acknowledged. The authors would also like to thank Dr. S. C. Bose and Mr. M. Santosh for sensor characterization.

References

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    W.P. Eaton, J.H. Smith, Micromachined pressure sensors: review and recent developments. Smart Mater. Struct. 6(5), 530–539 (1997)ADSCrossRefGoogle Scholar
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    A.L. Herrera-May et al., Electromechanical analysis of a piezoresistive pressure micro-sensor for low-pressure biomedical applications, in Revista Mexicana De Física, vol. 55 (2009), pp. 14–24Google Scholar

Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  1. 1.PilaniIndia

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