Development of Barometric Pressure Sensor for Micro Air Vehicle Application

  • S. Santosh KumarEmail author
  • Amit Tanwar
  • B. D. Pant
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)


This work describes the design and fabrication of a barometric pressure sensor for MAV application. The sensor has polysilicon piezoresistor and wet bulk micromachined diaphragm. The fabricated sensor shows good sensitivity of 34.78 mV/Bar at and an excellent non-linearity of <0.11%.



Authors would like to acknowledge the support of the Director, CSIR-CEERI, Pilani. The financial support by Council of Scientific and Industrial Research through ESC-107 is gratefully acknowledged. The authors would also like to thank Dr. S. C. Bose and Mr. M. Santosh for sensor characterization.


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Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  1. 1.PilaniIndia

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