Development of Barometric Pressure Sensor for Micro Air Vehicle Application
This work describes the design and fabrication of a barometric pressure sensor for MAV application. The sensor has polysilicon piezoresistor and wet bulk micromachined diaphragm. The fabricated sensor shows good sensitivity of 34.78 mV/Bar at and an excellent non-linearity of <0.11%.
Authors would like to acknowledge the support of the Director, CSIR-CEERI, Pilani. The financial support by Council of Scientific and Industrial Research through ESC-107 is gratefully acknowledged. The authors would also like to thank Dr. S. C. Bose and Mr. M. Santosh for sensor characterization.
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