Temperature Compensation of MEMS Capacitive Accelerometer for Navigational Application
Conference paper
First Online:
Abstract
To employ the MEMS device for navigational purpose; temperature stability, bias stability and linearity are the key parameters. In present paper, the effect of temperature variation on the output of z-axis capacitive accelerometer is discussed. In absence of any temperature compensation (TC) circuit, the accelerometer exhibited an out-put variation of 1875 ppm/°C. After employing the suitable TC circuit, the out-put variation is reduced to 75 ppm/°C.
References
- 1.R.K. Bhan, A.P. Shaveta, Y. Parmar, S. Dutta, R. Pal, Fabrication and characterization of crab-type capacitive MEMS accelerometer for defense applicationsGoogle Scholar
- 2.G. Liu, F. Yang, X. Bao, J. Tao, Robust optimization of a MEMS accelerometer considering temperature variationsGoogle Scholar
Copyright information
© Springer Nature Switzerland AG 2019