Temperature Compensation of MEMS Capacitive Accelerometer for Navigational Application
To employ the MEMS device for navigational purpose; temperature stability, bias stability and linearity are the key parameters. In present paper, the effect of temperature variation on the output of z-axis capacitive accelerometer is discussed. In absence of any temperature compensation (TC) circuit, the accelerometer exhibited an out-put variation of 1875 ppm/°C. After employing the suitable TC circuit, the out-put variation is reduced to 75 ppm/°C.