Design and Simulation of Acoustic Particle Velocity Sensor
Acoustic particle velocity sensor is a tiny sensor based on MEMS to measure particle velocity. It has ultra sensitivity at lower frequency. Design analysis & simulation is carried out to study sensitivity and frequency response of this sensor. Sensitivity achieved 1.5 mV/mm/s over a band width of 10 Hz to 1 kHz. Also fabrication process is described in this paper. Sensor is designed analytically using MATLAB and is simulated in FEM based COMSOL multi-physics software.