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Design and Simulation of Acoustic Particle Velocity Sensor

  • Saha TulanaEmail author
  • R. P. Singh
  • Barman Sanjeeev
  • Tauheed Abdul
  • Gupta Komal
  • Verma Devendra
  • D. K. Bhattacharya
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)

Abstract

Acoustic particle velocity sensor is a tiny sensor based on MEMS to measure particle velocity. It has ultra sensitivity at lower frequency. Design analysis & simulation is carried out to study sensitivity and frequency response of this sensor. Sensitivity achieved 1.5 mV/mm/s over a band width of 10 Hz to 1 kHz. Also fabrication process is described in this paper. Sensor is designed analytically using MATLAB and is simulated in FEM based COMSOL multi-physics software.

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Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Saha Tulana
    • 1
    Email author
  • R. P. Singh
    • 1
  • Barman Sanjeeev
    • 1
  • Tauheed Abdul
    • 1
  • Gupta Komal
    • 1
  • Verma Devendra
    • 1
  • D. K. Bhattacharya
    • 1
  1. 1.Solid State Physics LaboratoryTimarpur, New DelhiIndia

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