Development of Low Leakage Charged Particle Detectors Suitable for Alpha Spectroscopy
Charged Particle Detectors of different sizes suitable for high resolution alpha spectroscopy have been designed and developed successfully in Bharat Electronics Limited. The electrical characteristics of the devices show close agreement with the designed values. The stringent requirements of high breakdown voltage and low leakage current have been fulfilled by making necessary modification to the standard process and device design.
The authors would like to thank the management for the opportunity to present this work. They also acknowledge the constant support and encouragement from ED (Comp) and Sr. DGM (SP & PD Wafer Fab).
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