Self-heating in Inserted Oxide FINFETs

  • Narasimha Rao MavillaEmail author
  • Prashanth Paramahans Manik
  • Mohit Bajaj
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 215)


Thermal behavior of inserted oxide FinFET is studied and compared to that of conventional bulk and SOI FinFET. It is observed that thermal resistance and temperature rise in iFinFET with 3 nm thick inserted oxide is about 8% higher compared to conventional bulk FinFET. Effect of increasing inserted oxide thickness and thermal conductivity is further documented.


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Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Narasimha Rao Mavilla
    • 1
    Email author
  • Prashanth Paramahans Manik
    • 1
  • Mohit Bajaj
    • 1
  1. 1.Global FoundriesBengaluruIndia

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