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Data Analysis

  • James N. Hilfiker
  • Jianing Sun
  • Nina Hong
Chapter
Part of the Springer Series in Optical Sciences book series (SSOS, volume 212)

Abstract

Data analysis is an important aspect of spectroscopic ellipsometry (SE). The measurement is directly related to the polarization change of probing light upon reflection from a sample surface. Data analysis enables determination of physical material properties of interest, such as film thickness, material dielectric functions, composition, crystallinity, conductivity, and more. This is achieved through model-based regression analysis. In this chapter, we detail the typical SE data analysis procedures. The fundamentals of optical modeling are outlined. Different ways to describe material dielectric functions are reviewed. Principles of fitting and evaluation of results are discussed. The chapter concludes with a review of strategies for common sample structures, categorized as transparent thin films, absorbing thin films, or films which are both transparent and absorbing, depending on the wavelength considered.

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Copyright information

© Springer International Publishing AG, part of Springer Nature 2018

Authors and Affiliations

  1. 1.J.A. Woollam Co., Inc.LincolnUSA

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