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Solar Cells with Photonic and Plasmonic Structures

  • Peter PetrikEmail author
Chapter
Part of the Springer Series in Optical Sciences book series (SSOS, volume 212)

Abstract

The research on solar cells based on photonic, plasmonic and various nanostructured materials has been increasing in the recent years. A wide range of nanomaterial approaches are applied from photonic crystals to plasmonics, to trap light and enhance the absorption as well as the efficiency of solar cells. The first part of this chapter presents examples on applications that utilize nanostructured materials for photovoltaics. In the second part, ellipsometry related metrology issues are discussed briefly, dividing the topic in two major parts: effective medium and scatterometry approaches.

References

  1. 1.
    Z.R. Dai, Z.W. Pan, Z.L. Wang, Adv. Funct. Mater. 13, 9 (2003)CrossRefGoogle Scholar
  2. 2.
    F. Priolo, T. Gregorkiewicz, M. Galli, T.F. Krauss, Nat. Nanotechnol. 9, 19 (2014)ADSCrossRefGoogle Scholar
  3. 3.
    H.A. Atwater, A. Polman, Nat. Mater. 9, 205 (2010)ADSCrossRefGoogle Scholar
  4. 4.
    M. Florescu, H. Lee, I. Puscasu, M. Pralle, L. Florescu, D.Z. Ting, J.P. Dowling, Sol. Energy Mater. Sol. Cells 91, 1599 (2007)CrossRefGoogle Scholar
  5. 5.
    S.B. Mallick, M. Agrawal, P. Peumans, Opt. Expr. 18, 5691 (2010)ADSCrossRefGoogle Scholar
  6. 6.
    S. Basu Mallick, N.P. Sergeant, M. Agrawal, J.-Y. Lee, P. Peumans, MRS Bull. 36, 453 (2011)CrossRefGoogle Scholar
  7. 7.
    D.M. Callahan, J.N. Munday, H.A. Atwater, Nano Lett. 12, 214 (2012)ADSCrossRefGoogle Scholar
  8. 8.
    V.E. Ferry, A. Polman, H.A. Atwater, ACS Nano 5, 10055 (2011)CrossRefGoogle Scholar
  9. 9.
    C. Trompoukis, I. Abdo, R. Cariou, I. Cosme, W. Chen, O. Deparis, A. Dmitriev, E. Drouard, M. Foldyna, E. G.- Caurel, I. Gordon, B. Heidari, A. Herman, L. Lalouat, K.-D. Lee, J. Liu, K. Lodewijks, F. Mandorlo, I. Massiot, A. Mayer, V. Mijkovic, J. Muller, R. Orobtchouk, G. Poulain, P. Prod’Homme, P.R. i Cabarrocas, C. Seassal, J. Poortmans, R. Mertens, O. El Daif, V. Depauw, Phys. Status Solidi 212, 140 (2015)Google Scholar
  10. 10.
    C. van Lare, F. Lenzmann, M.A. Verschuuren, A. Polman, Nano Lett. 15, 4846 (2015)ADSCrossRefGoogle Scholar
  11. 11.
    M.-C. van Lare, A. Polman, ACS Photon. 2, 822 (2015)CrossRefGoogle Scholar
  12. 12.
    I.E. Khodasevych, L. Wang, A. Mitchell, G. Rosengarten, Adv. Opt. Mater. 3, 852 (2015)CrossRefGoogle Scholar
  13. 13.
    Y. Park, E. Drouard, O. El Daif, X. Letartre, P. Viktorovitch, A. Fave, A. Kaminski, M. Lemiti, C. Seassal, Opt. Expr. 17, 14312 (2009)ADSCrossRefGoogle Scholar
  14. 14.
    X. Meng, V. Depauw, G. Gomard, O. El Daif, C. Trompoukis, E. Drouard, C. Jamois, A. Fave, F. Dross, I. Gordon, C. Seassal, Opt. Expr. 20, 465 (2012)CrossRefGoogle Scholar
  15. 15.
    Y. Xu, Y. Xuan, J. Nanopart. Res. 17, 314 (2015)ADSCrossRefGoogle Scholar
  16. 16.
    A. Shalav, B.S. Richards, M.A. Green, Sol. Energy Mater. Sol. Cells 91, 829 (2007)CrossRefGoogle Scholar
  17. 17.
    R. Reisfeld, Opt. Mater. (Amst). 32, 850 (2010)ADSCrossRefGoogle Scholar
  18. 18.
    S. Colodrero, A. Mihi, J.A. Anta, M. Ocan, H. Míguez, J. Phys. Chem. C 113, 1150 (2009)CrossRefGoogle Scholar
  19. 19.
    P. Bermel, C. Luo, L. Zeng, L.C. Kimerling, J.D. Joannopoulos, Opt. Expr. 15, 16986 (2007)ADSCrossRefGoogle Scholar
  20. 20.
    A. Chutinan, N.P. Kherani, S. Zukotynski, Opt. Expr. 17, 8871 (2009)ADSCrossRefGoogle Scholar
  21. 21.
    S. Jain, V. Depauw, V.D. Miljkovic, A. Dmitriev, C. Trompoukis, I. Gordon, P. Van Dorpe, O. El Daif, Prog. Photovolt. Res. Appl. 23, 1144 (2015)CrossRefGoogle Scholar
  22. 22.
    J. Krc, M. Zeman, S.L. Luxembourg, M. Topic, Appl. Phys. Lett. 94, 6 (2009)CrossRefGoogle Scholar
  23. 23.
    J.G. Mutitu, S. Shi, C. Chen, T. Creazzo, A. Barnett, C. Honsberg, D.W. Prather, Opt. Expr. 16, 15238 (2008)ADSCrossRefGoogle Scholar
  24. 24.
    J. Grandidier, R.A. Weitekamp, M.G. Deceglie, D.M. Callahan, C. Battaglia, C.R. Bukowsky, C. Ballif, R.H. Grubbs, H.A. Atwater, Phys. Status Solidi 210, 255 (2013)ADSCrossRefGoogle Scholar
  25. 25.
    A. Mihi, H. Mı, H. Míguez, J. Phys. Chem. B 109, 15968 (2005)CrossRefGoogle Scholar
  26. 26.
    C.T. Yip, H. Huang, L. Zhou, K. Xie, Y. Wang, T. Feng, J. Li, W.Y. Tam, Adv. Mater. 23, 5624 (2011)CrossRefGoogle Scholar
  27. 27.
    L. Zeng, P. Bermel, Y. Yi, B. Alamariu, K. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, L.C. Kimerling, Appl. Phys. Lett. 93, 221105 (2008)ADSCrossRefGoogle Scholar
  28. 28.
    G. Gomard, E. Drouard, X. Letartre, X. Meng, A. Kaminski, A. Fave, M. Lemiti, E. Garcia-Caurel, C. Seassal, J. Appl. Phys. 108, 1 (2010)CrossRefGoogle Scholar
  29. 29.
    B. Curtin, R. Biswas, V. Dalal, Appl. Phys. Lett. 95, 231102 (2009)ADSCrossRefGoogle Scholar
  30. 30.
    O. El Daif, E. Drouard, G. Gomard, A. Kaminski, A. Fave, M. Lemiti, S. Ahn, S. Kim, P. Roca, I. Cabarrocas, H. Jeon, C. Seassal, Opt. Expr. 18, 293 (2010)CrossRefGoogle Scholar
  31. 31.
    V.E. Ferry, M.A. Verschuuren, C. Van Lare, R.E.I. Schropp, H.A. Atwater, A. Polman, Nano Lett. 11, 4239 (2011)ADSCrossRefGoogle Scholar
  32. 32.
    V. Depauw, X. Meng, O. El Daif, G. Gomard, L. Lalouat, E. Drouard, C. Trompoukis, A. Fave, C. Seassal, I. Gordon, IEEE J. Photovolt. 4, 215 (2014)CrossRefGoogle Scholar
  33. 33.
    E.D. Kosten, B.K. Newman, J.V. Lloyd, A. Polman, H.A. Atwater, IEEE J. Photovolt. 5, 61 (2015)CrossRefGoogle Scholar
  34. 34.
    D.-H. Ko, J.R. Tumbleston, L. Zhang, S. Williams, J.M. DeSimone, R. Lopez, E.T. Samulski, Nano Lett. 9, 2742 (2009)ADSCrossRefGoogle Scholar
  35. 35.
    R. Betancur, P. Romero-Gomez, A. Martinez-Otero, X. Elias, M. Maymó, J. Martorell, Nat. Photon. 7, 995 (2013)ADSCrossRefGoogle Scholar
  36. 36.
    J.R. Tumbleston, D.H. Ko, E.T. Samulski, R. Lopez, Appl. Phys. Lett. 94, 18 (2009)CrossRefGoogle Scholar
  37. 37.
    S.Y. Lin, J. Moreno, J.G. Fleming, Appl. Phys. Lett. 83, 380 (2003)ADSCrossRefGoogle Scholar
  38. 38.
    P. Nagpal, S.E. Han, A. Stein, D.J. Norris, Nano Lett. 8, 3238 (2008)ADSCrossRefGoogle Scholar
  39. 39.
    I. Prieto, B. Galiana, P. a. Postigo, C. Algora, L.J. Martínez, I. Rey-Stolle, Appl. Phys. Lett. 94, 25 (2009)ADSCrossRefGoogle Scholar
  40. 40.
    A. Mihi, M.E. Calvo, J.A. Anta, H. Miguez, J. Phys. Chem. C 112, 13 (2008)CrossRefGoogle Scholar
  41. 41.
    N. Tétreault, M. Grätzel, Energy Environ. Sci. 5, 8506 (2012)CrossRefGoogle Scholar
  42. 42.
    A. Bielawny, J. Üpping, P.T. Miclea, R.B. Wehrspohn, C. Rockstuhl, F. Lederer, M. Peters, L. Steidl, R. Zentel, S.-M. Lee, M. Knez, A. Lambertz, R. Carius, Phys. Status Solidi 205, 2796 (2008)ADSCrossRefGoogle Scholar
  43. 43.
    V. Hody-Le Caër, E. De Chambrier, S. Mertin, M. Joly, M. Schaer, J.L. Scartezzini, a. Schüler, Renew. Energy 53, 27 (2013)Google Scholar
  44. 44.
    F. Pratesi, M. Burresi, F. Riboli, K. Vynck, D.S. Wiersma, Opt. Expr. 21, 460 (2013)ADSCrossRefGoogle Scholar
  45. 45.
    K. Vynck, M. Burresi, F. Riboli, D.S. Wiersma, Nat. Mater. 11, 1017 (2012)ADSCrossRefGoogle Scholar
  46. 46.
    S. Colodrero, A. Mihi, L. Häggman, M. Ocaña, G. Boschloo, A. Hagfeldt, H. Míguez, Adv. Mater. 21, 764 (2009)CrossRefGoogle Scholar
  47. 47.
    K.-Q. Peng, X. Wang, X. Wu, S.-T. Lee, Appl. Phys. Lett. 95, 143119 (2009)ADSCrossRefGoogle Scholar
  48. 48.
    C.E.R. Disney, S. Pillai, C.M. Johnson, M.A. Green, ACS Photon. 2, 1108 (2015)CrossRefGoogle Scholar
  49. 49.
    E.C. Nelson, N.L. Dias, K.P. Bassett, S.N. Dunham, V. Verma, M. Miyake, P. Wiltzius, J.A. Rogers, J.J. Coleman, X. Li, P.V. Braun, Nat. Mater. 10, 676 (2011)ADSCrossRefGoogle Scholar
  50. 50.
    C. Trompoukis, O. El Daif, V. Depauw, I. Gordon, J. Poortmans, Appl. Phys. Lett. 101, 1–5 (2012)CrossRefGoogle Scholar
  51. 51.
    I. Abdo, C. Trompoukis, J. Deckers, V. Depauw, L. Tous, D. Van Gestel, R. Guindi, I. Gordon, O. El Daif, IEEE J. Photovolt. 4, 1261 (2014)CrossRefGoogle Scholar
  52. 52.
    J. Zhang, L. Zhang, W. Xu, J. Phys. D Appl. Phys. 45, 113001 (2012)ADSCrossRefGoogle Scholar
  53. 53.
    K.R. Catchpole, A. Polman, Opt. Expr. 16, 21793 (2008)ADSCrossRefGoogle Scholar
  54. 54.
    K.R. Catchpole, A. Polman, Appl. Phys. Lett. 93, 191113 (2008)ADSCrossRefGoogle Scholar
  55. 55.
    Y. Cui, Y. He, Y. Jin, F. Ding, L. Yang, Y. Ye, S. Zhong, Y. Lin, S. He, Laser Photon. Rev. 8, 495 (2014)ADSCrossRefGoogle Scholar
  56. 56.
    V.E. Ferry, M.A. Verschuuren, H.B.T. Li, E. Verhagen, R.J. Walters, R.E.I. Schropp, H.A. Atwater, A. Polman, Opt. Expr. 18, 237 (2010)ADSCrossRefGoogle Scholar
  57. 57.
    X. Li, C. Jia, B. Ma, W. Wang, Z. Fang, G. Zhang, X. Guo, Sci. Rep. 5, 14497 (2015)ADSCrossRefGoogle Scholar
  58. 58.
    J. Weickert, R.B. Dunbar, H.C. Hesse, W. Wiedemann, L. Schmidt-Mende, Adv. Mater. 23, 1810 (2011)CrossRefGoogle Scholar
  59. 59.
    W.C.H. Choy, X. Ren, IEEE J. Sel. Top. Quant. Elect. 22, 4100209 (2016)Google Scholar
  60. 60.
    L. Chen, S. Wang, C. Han, Y. Cheng, L. Qian, Synth. Met. 209, 544 (2015)CrossRefGoogle Scholar
  61. 61.
    A. de León, E. Arias, I. Moggio, C. Gallardo-Vega, R. Ziolo, O. Rodríguez, S. Trigari, E. Giorgetti, C. Leibig, D. Evans, J. Colloid Interf. Sci. 456, 182 (2015)ADSCrossRefGoogle Scholar
  62. 62.
    H.-L. Hsu, T.-Y. Juang, C.-P. Chen, C.-M. Hsieh, C.-C. Yang, C.-L. Huang, R.-J. Jeng, Sol. Energy Mater. Sol. Cells 140, 224 (2015)CrossRefGoogle Scholar
  63. 63.
    L. Yang, S. Pillai, M. a Green, Sci. Rep. 5, 11852 (2015)Google Scholar
  64. 64.
    H.K. Singh, B. Arunachalam, S. Kumbhar, P. Sharma, C.S. Solanki, Plasmonics 11, 323 (2015)CrossRefGoogle Scholar
  65. 65.
    X. Lan, S. Masala, E.H. Sargent, Nat. Mater. 13, 233 (2014)ADSCrossRefGoogle Scholar
  66. 66.
    C.S.S. Sandeep, S. ten Cate, J. M. Schins, T.J. Savenije, Y. Liu, M. Law, S. Kinge, A.J. Houtepen, L.D. a Siebbeles, Nat. Commun. 4, 2360 (2013)Google Scholar
  67. 67.
    V.V. Kislyuk, O.P. Dimitriev, Nanorods and nanotubes for solar cells. J. Nanosci. Nanotechnol. 8, 131 (2008)CrossRefGoogle Scholar
  68. 68.
    R.-N. Sun, K.-Q. Peng, B. Hu, Y. Hu, F.-Q. Zhang, S.-T. Lee, Appl. Phys. Lett. 107, 013107 (2015)ADSCrossRefGoogle Scholar
  69. 69.
    K. Peng, X. Wang, L. Li, X. Wu, S. Lee, J. Am. Chem. Soc. 132, 6872 (2010)CrossRefGoogle Scholar
  70. 70.
    F. Meinardi, H. McDaniel, F. Carulli, A. Colombo, K. a. Velizhanin, N.S. Makarov, R. Simonutti, V.I. Klimov, S. Brovelli, Nat. Nanotechnol. 178, 1 (2015)Google Scholar
  71. 71.
    C. Hägglund, G. Zeltzer, R. Ruiz, I. Thomann, H.B.R. Lee, M.L. Brongersma, S.F. Bent, Nano Lett. 13, 3352 (2013)ADSCrossRefGoogle Scholar
  72. 72.
    M. Losurdo, M.M. Giangregorio, G.V. Bianco, A. Sacchetti, P. Capezzuto, A.G. Bruno, Sol. Energy Mater. Sol. Cells 93, 1749 (2009)CrossRefGoogle Scholar
  73. 73.
    N.I. Zheludev, Opt. Photon. News, 30 (2011)Google Scholar
  74. 74.
    E.E. Narimanov, H. Li, Y.A. Barnakov, T.U. Tumkur, M.A. Noginov, Opt. Expr. 21, 215 (2013)CrossRefGoogle Scholar
  75. 75.
    D. Ji, H. Song, X. Zeng, H. Hu, K. Liu, N. Zhang, Q. Gan, Sci. Rep. 4, 4498 (2014)ADSCrossRefGoogle Scholar
  76. 76.
    J. Hao, J. Wang, X. Liu, W.J. Padilla, L. Zhou, M. Qiu, Appl. Phys. Lett. 96, 251104 (2010)ADSCrossRefGoogle Scholar
  77. 77.
    C. Wu, B.N. Iii, J. John, A. Milder, B. Zollars, S. Savoy, G. Shvets, J. Opt. 14, 024005 (2012)ADSCrossRefGoogle Scholar
  78. 78.
    K. Liu, B. Zeng, H. Song, Q. Gan, F.J. Bartoli, Z.H. Kafa, Opt. Commun. 314, 48 (2014)ADSCrossRefGoogle Scholar
  79. 79.
    J. Yang, M. Huang, C. Yang, Z. Xiao, P. Jinhui, Opt. Expr. 17, 19656 (2009)ADSCrossRefGoogle Scholar
  80. 80.
    H. Wang, L. Wang, Opt. Expr. 21, 13311 (2013)Google Scholar
  81. 81.
    Y. Wang, T. Sun, T. Paudel, Y. Zhang, Z. Ren, K. Kempa, Nano Lett. 12, 440 (2011)ADSCrossRefGoogle Scholar
  82. 82.
    S. Molesky, C.J. Dewalt, Z. Jacob, Opt. Expr. 21, 96 (2013)ADSCrossRefGoogle Scholar
  83. 83.
    T. Stelzner, M. Pietsch, G. Andra, F. Falk, E. Ose, S. Christiansen, Nanotechnology 19, 295203 (2008)CrossRefGoogle Scholar
  84. 84.
    L. Tsakalakos, J. Balch, J. Fronheiser, B.A. Korevaar, O. Sulima, J. Rand, L. Tsakalakos, J. Balch, J. Fronheiser, B.A. Korevaar, Appl. Phys. Lett. 91, 233117 (2015)ADSCrossRefGoogle Scholar
  85. 85.
    M. Law, L.E. Greene, J.C. Johnson, R. Saykally, Nat. Mater. 4, 455 (2005)ADSCrossRefGoogle Scholar
  86. 86.
    C. Sugnaux, A. D. Mallorquí, J. Herriman, H.-A. Klok, and A.F. i Morral, Adv. Funct. Mater. 25, 3958 (2015)Google Scholar
  87. 87.
    J. Huang, C. Hsiao, S. Syu, J. Chao, C. Lin, Sol. Energy Mater. Sol. Cells 93, 621 (2009)CrossRefGoogle Scholar
  88. 88.
    C. Xu, J. Wu, U.V. Desai, D. Gao, J. Am. Chem. Soc. 133, 8122 (2011)CrossRefGoogle Scholar
  89. 89.
    O.L. Muskens, J.G. Rivas, R.E. Algra, E.P.A.M. Bakkers, A. Lagendijk, Nano Lett. 8, 2638 (2008)ADSCrossRefGoogle Scholar
  90. 90.
    L. Cao, J.S. White, J. Park, J.A. Schuller, B.M. Clemens, M.L. Brongersma, Nat. Mater. 8, 643 (2009)ADSCrossRefGoogle Scholar
  91. 91.
    E. Garnett, P. Yang, Nano Lett. 10, 1082 (2010)ADSCrossRefGoogle Scholar
  92. 92.
    T. Khudiyev, M. Bayindir, Sci. Rep. 4, 7505 (2014)ADSCrossRefGoogle Scholar
  93. 93.
    Y. Yang, J. Qing, J. Ou, X. Lin, Z. Yuan, D. Yu, X. Zhou, X. Chen, Sol. Energy 122, 231 (2015)ADSCrossRefGoogle Scholar
  94. 94.
    K. Islam, F.I. Chowdhury, A.K. Okyay, A. Nayfeh, Sol. Energy 120, 257 (2015)ADSCrossRefGoogle Scholar
  95. 95.
    C. Trompoukis, O. El Daif, P. Pratim Sharma, H. Sivaramakrishnan Radhakrishnan, M. Debucquoy, V. Depauw, K. Van Nieuwenhuysen, I. Gordon, R. Mertens, J. Poortmans, Prog. Photovolt. Res. Appl. 23, 734 (2015)Google Scholar
  96. 96.
    A. Herman, C. Trompoukis, V. Depauw, O. El Daif, O. Deparis, J. Appl. Phys. 112, 11 (2012)CrossRefGoogle Scholar
  97. 97.
    I. Abdo, C. Trompoukis, L. Tous, R. Guindi, I. Gordon, O. El Daif, IEEE J. Photovolt. 5, 1319 (2015)CrossRefGoogle Scholar
  98. 98.
    T. Fleetham, J.-Y. Choi, H.W. Choi, T. Alford, D.S. Jeong, T.S. Lee, W.S. Lee, K.-S. Lee, J. Li, I. Kim, Sci. Rep. 5, 14250 (2015)ADSCrossRefGoogle Scholar
  99. 99.
    P.S. Hauge, J. Opt. Soc. Am. 68, 1519 (1978)ADSCrossRefGoogle Scholar
  100. 100.
    R.W. Collins, J. Koh, J. Opt. Soc. Am. 16, 1997 (1999)ADSCrossRefGoogle Scholar
  101. 101.
    P. Petrik, E. Agocs, J. Volk, I. Lukacs, B. Fodor, P. Kozma, T. Lohner, S. Oh, Y. Wakayama, T. Nagata, M. Fried, Thin Solid Films 571, 579 (2014)ADSCrossRefGoogle Scholar
  102. 102.
    P. Petrik, N. Kumar, M. Fried, B. Fodor, G. Juhasz, S.F. Pereira, S. Burger, H.P. Urbach, J. Eur. Opt. Soc. Rapid Publ. 10, 15002 (2015)CrossRefGoogle Scholar
  103. 103.
    W.G. Egan, D.E. Aspnes, Phys. Rev. B 26, 5313 (1982)ADSCrossRefGoogle Scholar
  104. 104.
    T.W.H. Oates, H. Wormeester, H. Arwin, Prog. Surf. Sci. 86, 328 (2011)ADSCrossRefGoogle Scholar
  105. 105.
    P. Petrik, M. Fried, Ellipsometry of Semiconductor Nanocrystals, in Ellipsometry at the Nanoscale, ed. by M. Losurdo, K. Hingerl (Springer, Heidelberg, 2012), p. 583Google Scholar
  106. 106.
    E. Vazsonyi, E. Szilagyi, P. Petrik, Z.E. Horvath, T. Lohner, M. Fried, G. Jalsovszky, P. Petrik, T. Lohner, M. Fried, G. Jalsovszky, E. Szilagyi, P. Petrik, Z.E. Horvath, T. Lohner, M. Fried, G. Jalsovszky, Thin Solid Films 388, 295 (2001)ADSCrossRefGoogle Scholar
  107. 107.
    P. Petrik, Phys. B Condens. Mat. 453, 2 (2014)ADSCrossRefGoogle Scholar
  108. 108.
    P. Petrik, M. Fried, E. Vazsonyi, P. Basa, T. Lohner, P. Kozma, Z. Makkai, J. Appl. Phys. 105, 024908 (2009)ADSCrossRefGoogle Scholar
  109. 109.
    J. Li, J. Chen, M.N. Sestak, R.W. Collins, IEEE J. Photovolt. 1, 187 (2011)CrossRefGoogle Scholar
  110. 110.
    J. Springer, A. Poruba, M. Vanecek, S. Fay, L. Feitknecht, N. Wyrsch, J. Meier, A. Shah, T. Repmann, O. Kluth, H. Stiebig, B. Rech, Proceedings of 17th European Photovoltanics Solary Energy Conference, vol. 1 (2001)Google Scholar
  111. 111.
    K. Hinrichs, K. Eichhorn, Ellipsometry of Functional Organic Surfaces and Films (Heidelberg, 2014)Google Scholar
  112. 112.
    H. Wormeester, T.W.H. Oates, Thin films of nanostructured noble metals, in Ellipsometry at the Nanoscale, ed. by M. Losurdo, K. Hingerl (Springer, Berlin Heidelberg, 2013) p. 225CrossRefGoogle Scholar
  113. 113.
    D.E. Aspnes, Thin Solid Films 89, 249 (1982)ADSCrossRefGoogle Scholar
  114. 114.
    D.E. Aspnes, A.A. Studna, E. Kinsbron, Phys. Rev. B 29, 768 (1984)ADSCrossRefGoogle Scholar
  115. 115.
    H. Arwin, D. E. Aspnes, J. Vac. Sci. Technol. A Vacuum Surf. Film. 2, 1316 (1984)Google Scholar
  116. 116.
    E. Agocs, B. Fodor, B. Pollakowski, B. Beckhoff, A. Nutsch, M. Jank, P. Petrik, Thin Solid Films 571, 684 (2014)ADSCrossRefGoogle Scholar
  117. 117.
    R.W. Collins, A.S. Ferlauto, Optical physics of materials, in Handbook of Ellipsometry, ed. by E.G. Irene, H.G. Tomkins (Norwich, NY, William Andrew, 2005)Google Scholar
  118. 118.
    B. John, J. S. Hale, Phys. Stat. Sol. 205, 715 (2008)Google Scholar
  119. 119.
    P. Petrik, O. Polgár, M. Fried, T. Lohner, N.Q. Khánh, J. Gyulai, O. Polgár, M. Fried, T. Lohner, N.Q. Khánh, J. Gyulai, J. Appl. Phys. 93, 1987 (2003)ADSCrossRefGoogle Scholar
  120. 120.
    P. Kozma, B. Fodor, A. Deak, P. Petrik, Langmuir 26, 16122 (2010)CrossRefGoogle Scholar
  121. 121.
    D.E. Aspnes, J.B. Theeten, F. Hottier, Phys. Rev. B 20, 3292 (1979)ADSCrossRefGoogle Scholar
  122. 122.
    E. Strein, D. Allred, Thin Solid Films 517, 1011 (2008)ADSCrossRefGoogle Scholar
  123. 123.
    E.A. Irene, SiO_2 Films, in Handbook of Ellipsometry, ed. by E.G. Irene, H.G. Tomkins (Norwich, NY, William Andrew, 2005)Google Scholar
  124. 124.
    C.M. Herzinger, B. Johs, W.A. McGahan, J.A. Woollam, W. Paulson, J. Appl. Phys. 83, 3323 (1998)ADSCrossRefGoogle Scholar
  125. 125.
    H.-T. Huang, W. Kong, F.L. Terry, Appl. Phys. Lett. 78, 3983 (2001)ADSCrossRefGoogle Scholar
  126. 126.
    G.R. Muthinti, B. Peterson, A.C. Diebold, Proc. SPIE 8324, 83240O (2012)ADSCrossRefGoogle Scholar
  127. 127.
    X. Chen, S. Liu, C. Zhang, H. Jiang, Z. Ma, T. Sun, Z. Xu, Opt. Expr. 22, 15165 (2014)ADSCrossRefGoogle Scholar
  128. 128.
    M.G. Moharam, D.A. Pommet, E.B. Grann, J. Opt. Soc. Am. 12, 1077 (1995)ADSCrossRefGoogle Scholar
  129. 129.
    P.C.Y. Huang, R.C.J. Chen, F. Chen, B. Perng, J. Shieh, SPIE Proc. 6152, 1 (2006)Google Scholar
  130. 130.
    T.A. Germer, C.C. Asmail, Rev. Sci. Instrum. 70, 3688 (1999)ADSCrossRefGoogle Scholar
  131. 131.
    M. Wurm, F. Pilarski, B. Bodermann, Rev. Sci. Instrum. 81, 023701 (2010)ADSCrossRefGoogle Scholar
  132. 132.
    P.-E. Hansen, S. Burger, Proc. SPIE Int. Soc. Opt. Eng. 8789, 87890R (2013)Google Scholar
  133. 133.
    B. Bodermann, P.-E. Hansen, S. Burger, M.-A. Henn, H. Gross, M. Bär, F. Scholze, J. Endres, M. Wurm, SPIE Proc. 8466, 84660E–1 (2012)CrossRefGoogle Scholar
  134. 134.
    E. Agocs, B. Bodermann, S. Burger, G. Dai, J. Endres, P.-E. Hansen, L. Nielson, M.H. Madsen, S. Heidenreich, M. Krumrey, B. Loechel, J. Probst, F. Scholze, V. Soltwisch, M. Wurm, SPIE Proc. 9556, 955610 (2015)CrossRefGoogle Scholar
  135. 135.
    M. Wurm, S. Bonifer, B. Bodermann, J. Richter, Meas. Sci. Technol. 22, 094024 (2011)ADSCrossRefGoogle Scholar
  136. 136.
    M. Foldyna, T.A. Germer, B.C. Bergner, R.G. Dixson, Thin Solid Films 519, 2633 (2011)ADSCrossRefGoogle Scholar
  137. 137.
    P. Boher, M. Luet, T. Leroux, J. Petit, P. Barritault, J. Hazart, P. Chaton, SPIE Proc. 5375, 1302 (2004)ADSCrossRefGoogle Scholar
  138. 138.
    O. El Gawhary, N. Kumar, S.F. Pereira, W.M.J. Coene, H.P. Urbach, Appl. Phys. B 105, 775 (2011)ADSCrossRefGoogle Scholar
  139. 139.
    N. Kumar, P. Petrik, G.K.P. Ramanandan, O. El Gawhary, S. Roy, S.F. Pereira, W.M.J. Coene, H.P. Urbach, Opt. Expr. 22, 24678 (2014)ADSCrossRefGoogle Scholar
  140. 140.
    J. Endres, N. Kumar, P. Petrik, M. Henn, S. Heidenreich, S.F. Pereira, H.P. Urbach, B. Bodermann, SPIE Proc. 9132, 913208 (2014)Google Scholar
  141. 141.
    S. Roy, N. Kumar, S.F. Pereira, H.P. Urbach, J. Opt. 15, 75707 (2013)CrossRefGoogle Scholar
  142. 142.
    S. Burger, L. Zschiedrich, J. Pomplun, F. Schmidt, B. Bodermann, Proceedings of SPIE 8681, Metrology Inspections Process Control Microlithography XXVII, vol. 8681, p. 868119 (2013)Google Scholar

Copyright information

© Springer International Publishing AG, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Institute for Technical Physics and Materials Science, Centre for Energy Research, Hungarian Academy of SciencesBudapestHungary

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