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Micrometer-Scale Photo-Direct Machining of Polydimethylsiloxane Using Laser Plasma EUV Radiations

Conference paper
First Online:
Part of the Springer Proceedings in Physics book series (SPPHY, volume 202)

Abstract

We have investigated photo-direct micromachining of PDMS sheets using laser plasma EUV radiations. The EUV light was radiated from laser plasma. The generated EUV light was focused using an ellipsoidal mirror and was incident on PDMS sheets through windows of a contact mask. Square micro-holes are precisely fabricated on a PDMS sheet. We have established a technique for precisely micromachining PDMS sheets in a micrometer-scale.

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Copyright information

© Springer International Publishing AG 2018

Authors and Affiliations

  1. 1.Institute of Applied PhysicsUniversity of TsukubaTsukubaJapan

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