Control of a Magnet-Driven Nano Positioning Stage with Long Stroke Based on Disturbance Observer

Conference paper
First Online:
Part of the Lecture Notes in Computer Science book series (LNCS, volume 10464)

Abstract

In this paper, a proportional-derivative (PD) controller combined with a disturbance observer is adopted for a designed magnet-driven nano positioning stage. Firstly, the magnet-driven positioning stage with long stroke and nano positioning accuracy is introduced in detail. The stage adopts air bearings to eliminate complicated nonlinear friction effect. The actuator of the stage is a permanent magnet synchronous linear motor which uses ironless windings to eliminate the cogging force and attenuate the reluctance force. Then, a PD controller combined with a disturbance observer is used to control the stage. The validation experiment is carried out based on Matlab/Simulink Real-Time toolbox. The experimental results shows that the maximum travel range is 50 mm and positioning accuracy no bigger than 3 nm. The compared experiment with a conventional proportional-integral-derivative controller shows ten times better position accuracy is acquired by using proposed controller.

Keywords

Nano positioning stage Disturbance observer Long stroke Magnet-driven actuator Air bearing 
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Copyright information

© Springer International Publishing AG 2017

Authors and Affiliations

  1. 1.State Key Laboratory of Mechanical System and Vibration, School of Mechanical EngineeringShanghai Jiao Tong UniversityShanghaiChina

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