Impact of Ion Nitriding on Phase Composition, Structure and Properties of Carbon Films Doped with Metals
Abstract
The main modification laws of properties, phase composition and mechanical properties of single component and metal alloyed (Cr, Ti, Cu) carbon coatings subjected to ion nitriding are defined. It is stated that ion nitriding gives rise to the fraction of sp2-phase while reducing the cluster size in the surface layers. The formation of CNx compounds with dominating bonds of N–Csp2 type is determined at ion nitriding of carbon containing coatings. The single component carbon coatings being ion nitrided are characterized by more dispersed structure, bigger content of N–Csp3 bonds in comparison with the structure and composition of coatings formed at the conditions of ion assistance or with the appearance of molecular nitrogen.
Keywords
Carbon coatings Alloying Nitriding Phase composition Morphology Hardness FrictionNotes
Acknowledgments
This work was supported by the Belarusian Republican Foundation for Fundamental Research with the Project (T16 M-015) for 2016-2018 and National Natural Science Foundation of China (51373077), 2015–2016 Intergovernmental Cooperation Projects in Science and Technology of the Ministry of Science and Technology of PRC (No. CB11-09 & CB11-11).
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