Introduction to Miniaturisation

Chapter
First Online:
Part of the Springer Tracts in Mechanical Engineering book series (SPTME)

Abstract

Miniaturisation of systems and devices is a trend that started a few decades ago, and which is becoming more and more relevant to our everyday lives. The concept of micro-manufacturing evolved as a direct result of manufacturing technologies used for integrated circuit fabrication. These allowed batch processing, but limited the range of materials and geometries. A range of micro-manufacturing technologies has been developed to overcome these limitations. The aim of this chapter is to review the main physical phenomena related to miniaturisation, in terms of scaling laws, forces, materials, processes and production systems. Indeed, when approaching the micro-scale, some physical phenomena considered negligible at the macro-scale, become significant and have to be taken into account in the design, manufacturing, and assembly of micro-devices.

Keywords

Shape Memory Alloy Uncut Chip Thickness Dielectric Elastomer Electrostrictive Material Minimum Uncut Chip Thickness 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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References

  1. 1.
    Feynman RP (1960) There’s plenty of room at the bottom. Eng Sci 23(5):22–36Google Scholar
  2. 2.
    Madou MJ (2002) Fundamentals of microfabrication: the science of miniaturization. CRC Press, ClevelandGoogle Scholar
  3. 3.
    Ghosh A, Corves B (2015) Introduction to micromechanisms and microactuators. Springer, IndiaGoogle Scholar
  4. 4.
    Squires TM, Quake SR (2005) Microfluidics: fluid physics at the nanoliter scale. Rev of Mod Phys 77(3):977–1026. ISSN 0034-6861Google Scholar
  5. 5.
    Van Brussel H, Peirs J, Reynaerts D, Delchambre A, Reinhart G, Roth N, Weck M, Zussman E (2000) Assembly of micro-systems. Ann CIRP 49(2):451–472CrossRefGoogle Scholar
  6. 6.
    Zhou Shu-Ang (2003) On forces in microelectromechanical systems. Intl J Eng Sci 41:313–335CrossRefGoogle Scholar
  7. 7.
    Milonni PW (1994) The quantum vacuum: an introduction to quantum electrodynamics. Academic Press, San DiegoGoogle Scholar
  8. 8.
    Rob Legtenberg A, Groeneveld W, Elwenspoek M (1996) Comb-drive actuators for large displacements. J Micromech Microeng 6:320–329CrossRefGoogle Scholar
  9. 9.
    Wallash AJ, Levit L (2003) Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps. In: Micromachining and microfabrication. International society for optics and photonics, pp 87–96Google Scholar
  10. 10.
    Townsend JS (1915) Electricity in gases. Clarendon Press, OxfordGoogle Scholar
  11. 11.
    Nye JF (1985) Physical properties of crystals. Clarendon Press, OxfordMATHGoogle Scholar
  12. 12.
    Hall EO (1951) Deformation and ageing of mild steel. Phys Soc Proc 64(B381):747–753CrossRefGoogle Scholar
  13. 13.
    Petch NJ (1953) Cleavage strength of polycrystals. J Iron Steel Inst 174:25–28Google Scholar
  14. 14.
    Chang H, Altstetter CJ, Averbach RS (1995) Nanophase metals-processing and properties. In Advanced materials and processing 3Google Scholar
  15. 15.
    Fu MW, Chan WL (2014) Micro-scaled products development via microforming. Springer series in advanced manufacturing. Springer, London. doi: 10.1007/978-1-4471-6326-8_2
  16. 16.
    Weissmüller J, Löffler J, Kleber M (1995) Atomic structure of nanocrystaline metals studied by diffraction techniques ad EXAFS. Nanostruct Mater 6(1–4):105–114CrossRefGoogle Scholar
  17. 17.
    Yoshizawa Y, Oguma S, Yamauchi K (1988) New Fe-based soft magnetic-alloys composed of ultrafine grain-structure. J Appl Phys 64:6044–6046CrossRefGoogle Scholar
  18. 18.
    Liu QY, Zhang QH, Zhang JH, Zhang M (2014) Influence of grain size and grain boundary of workpiece on micro EDM. Adv Mater Res 941–944:2116–2120. doi: 10.4028/www.scientific.net/AMR.941-944.2116 CrossRefGoogle Scholar
  19. 19.
    Vogler MP, DeVor RE, Kapoor SG (2004) On the modeling and analysis of machining performance in micro-endmilling. Part I: surface generation. ASME J Manuf Sci Eng 126:685–694CrossRefGoogle Scholar
  20. 20.
    Vogler MP, DeVor RE, Kapoor SG (2004) On the modeling and analysis of machining performance in micro-endmilling. Part II: cutting force prediction. ASME J Manuf Sci Eng 126:695–705CrossRefGoogle Scholar
  21. 21.
    Susmita K (2013) Introduction, classification and applications of smart materials: an overview. Am J Appl Sci 10(8):876–880CrossRefGoogle Scholar
  22. 22.
    Ahmad I (1988) ‘Smart’ structures and materials. In: Rogers CA (ed) Proceedings of army research office workshop on smart materials, structures and mathematical issues. Virginia Polytechnic Institute and State University, Blacksburg, VA, pp 13–16, 15–16 Sept 1988Google Scholar
  23. 23.
    Akhras G (2000) Smart materials and smart systems for the future. Can Military J 1(3):24–31Google Scholar
  24. 24.
    Dineva P, Gross D, Müller R, Rangelov T (2014) Piezoelectric materials in dynamic fracture of piezoelectric materials. Springer International Publishing, SwitzerlandGoogle Scholar
  25. 25.
    Delaey L (1991) Phase transformations in materials. In: Cahn RW, Haasen P, Kramer EJ (eds). Material science and technology, vol 5. VCH, WeinheimGoogle Scholar
  26. 26.
    Nespoli A, Besseghini S, Pittaccio S, Villa E, Viscuso S (2010) The high potential of shape memory alloys in developing miniature mechanical devices: a review on shape memory alloy mini-actuators. Sens Actuators A 158:149–160CrossRefGoogle Scholar
  27. 27.
    Hu M, Fu Y, Du H, Ling S (2004) Titanium nickel thin films for microactuation. In: Proceedings of the 9th international conference on new actuators, June. ISBN-3-933339-06-5: 79Google Scholar
  28. 28.
    Bar-Cohen Y (2001) Electroactive polymer (EAP) actuators as artificial muscles (reality, potential, and challenges). SPIE Press, BellinghamGoogle Scholar
  29. 29.
    Samatham R, Kim KJ, Dogruer D, Choi HR, Konyo M, Madden JD, Nakabo Y, Nam JD, Su J, Tadokoro S, Yim W, Yamakita M (2007) Active polymers: an overview in electroactive polymers for robotic applications: artificial muscles and sensors. Springer, LondonGoogle Scholar
  30. 30.
    Kawahara N, Suto T, Hirano T, Ishikawa Y, Kitahara T, Ooyama N, Ataka T (1997) Microfactories; new applications of micromachine technology to the manufacture of small products. Microsyst Technol 3:37–41Google Scholar
  31. 31.
    Feddema JT, Xavier P, Brown R (1998) Assembly planning at the micro scale. In: Proceeding of the workshop on precision manipulation at the micro and nano scales, proceedings of IEEE international conference on robotics and automation, Leuven, Belgium, May 16–20Google Scholar
  32. 32.
    Tanaka M (2001) Development of desktop machining microfactory. RIKEN Review 34: focused on advances on micro-mechanical fabrication techniquesGoogle Scholar
  33. 33.
  34. 34.
  35. 35.
    Verettas I, Clavel R, Codourey A (2005) “Pocket factory”: concept of miniaturized modular cleanrooms, not yet published (No. LSRO2-CONF-2005-017) available at http://infoscience.epfl.ch/record/63609/files/TMMF05-pocketfactory.pdf
  36. 36.
    Bacher JP, Bottinelli S, Breguet JM, Clavel R (2002) Delta3: a new ultra-high precision micro-robot. Journal Européen des Systèmes Automatisés, Hermes 36(9):1263–1275Google Scholar
  37. 37.
    Rizzi AA, Gowdy J, Hollis RL (1997) Agile assembly architecture: an agent based approach to modular precision assembly systems. In: Proceedings of IEEE international conference on robotics and automation, pp 1511–1516Google Scholar
  38. 38.
    Hollis RL, Cowdy J, Rizzi AA (2004) Design and development of a tabletop precision assembly system. Mechatronics & robotics 2004, IEEE, Aachen, Germany, pp 1624–1628, 13–15 Sept 2004Google Scholar

Copyright information

© Springer International Publishing Switzerland 2017

Authors and Affiliations

  1. 1.Institute of Industrial Technology and AutomationConsiglio Nazionale delle RicercheMilanItaly

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