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Free Open Source Mesh Healing for TCAD Device Simulations

  • Florian Rudolf
  • Josef Weinbub
  • Karl Rupp
  • Peter Resutik
  • Andreas Morhammer
  • Siegfried Selberherr
Conference paper
Part of the Lecture Notes in Computer Science book series (LNCS, volume 9374)

Abstract

Device geometries in technology computer-aided design processes are often generated using parametric solid modeling computer-aided design tools. However, geometries generated with these tools often lack geometric properties, like being intersection-free, which are required for volumetric mesh generation as well as discretization methods. Contributing to this problem is the fact, that device geometries often have multiple regions, used for, e.g., assigning different material parameters. Therefore, a healing process of the geometry is required, which detects the errors and repairs them. In this paper, we identify errors in multi-region device geometries created using computer-aided design tools. A robust algorithm pipeline for healing these errors is presented, which has been implemented in ViennaMesh. This algorithm pipeline is applied on complex device geometries. We show, that our approach robustly heals device geometries created with computer-aided design tools and is even able to handle certain modeling inaccuracies.

Keywords

Device Geometry March Cube Algorithm Singular Vertex Free Open Source Mesh Generation Algorithm 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgements

This work has been supported by the European Research Council (ERC), grant #247056 MOSILSPIN and by the Austrian Science Fund FWF, grant P23598.

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Copyright information

© Springer International Publishing Switzerland 2015

Authors and Affiliations

  • Florian Rudolf
    • 1
  • Josef Weinbub
    • 1
  • Karl Rupp
    • 1
    • 2
  • Peter Resutik
    • 1
  • Andreas Morhammer
    • 3
  • Siegfried Selberherr
    • 1
  1. 1.Institute for MicroelectronicsTU WienViennaAustria
  2. 2.Institute for Analysis and Scientific ComputingTU WienViennaAustria
  3. 3.Christian Doppler Laboratory for Reliability Issues in Microelectronics, Institute for MicroelectronicsTU WienViennaAustria

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