Free Open Source Mesh Healing for TCAD Device Simulations

  • Florian Rudolf
  • Josef Weinbub
  • Karl Rupp
  • Peter Resutik
  • Andreas Morhammer
  • Siegfried Selberherr
Conference paper
Part of the Lecture Notes in Computer Science book series (LNCS, volume 9374)


Device geometries in technology computer-aided design processes are often generated using parametric solid modeling computer-aided design tools. However, geometries generated with these tools often lack geometric properties, like being intersection-free, which are required for volumetric mesh generation as well as discretization methods. Contributing to this problem is the fact, that device geometries often have multiple regions, used for, e.g., assigning different material parameters. Therefore, a healing process of the geometry is required, which detects the errors and repairs them. In this paper, we identify errors in multi-region device geometries created using computer-aided design tools. A robust algorithm pipeline for healing these errors is presented, which has been implemented in ViennaMesh. This algorithm pipeline is applied on complex device geometries. We show, that our approach robustly heals device geometries created with computer-aided design tools and is even able to handle certain modeling inaccuracies.


Device Geometry March Cube Algorithm Singular Vertex Free Open Source Mesh Generation Algorithm 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



This work has been supported by the European Research Council (ERC), grant #247056 MOSILSPIN and by the Austrian Science Fund FWF, grant P23598.


  1. 1.
  2. 2.
  3. 3.
  4. 4.
  5. 5.
    Strikwerda, J.C.: Finite difference schemes and partial differential equations, 2nd edn. SIAM, Philadelphia (2004) ISBN: 978-0-89871-567-5Google Scholar
  6. 6.
    Cheng, S.W., Dey, T.K., Shewchuk, J.R.: Delaunay Mesh Generation. CRC Press, Boca Raton (2013) ISBN: 978-1584887300Google Scholar
  7. 7.
    Pratt, M.J.: Introduction to ISO 10303 - the STEP standard for product data exchange. J. Comput. Inf. Sci. Eng. 1(1), 102–103 (2001). doi: 10.1115/1.1354995 CrossRefGoogle Scholar
  8. 8.
    Si, H.: TetGen a quality tetrahedral mesh generator and three-dimensional delaunay triangulator, Version 1.4, User Manual (2006).
  9. 9.
    Szilvási-Nagy, M., Mátyási, G.: Analysis of STL files. J. Math. Comput. Model. 38(7–9), 945–960 (2003). doi: 10.1016/S0895-7177(03)90079-3 zbMATHCrossRefGoogle Scholar
  10. 10.
  11. 11.
    Attene, M., Campen, M., Kobbelt, L.: Polygon mesh repairing: an application perspective. ACM Comput. Surv. 45(2), 1–33 (2013). doi: 10.1145/2431211.2431214 CrossRefGoogle Scholar
  12. 12.
    Chong, C., Kumar, A.S., Lee, H.: Automatic mesh-healing technique for model repair and finite element model generation. J. Finite Elem. Anal. Des. 43(15), 1109–1119 (2007). doi: 10.1016/j.finel.2007.06.009 CrossRefGoogle Scholar
  13. 13.
    Frederick, C., Wong, Y., Edge, F.: Two-dimensional automatic mesh generation for structural analysis. Int. J. Numer. Meth. Eng. 2, 133–144 (1970). doi: 10.1002/nme.1620020112 CrossRefGoogle Scholar
  14. 14.
    Hoppe, H.: Progressive meshes. In: Proceedings of the 23rd Annual Conference on Computer Graphics and Interactive Techniques, pp. 99–108. New York (1996). doi: 10.1145/237170.237216
  15. 15.
    Ju, T.: Robust repair of polygonal models. ACM Trans. Graph. 23(3), 888–895 (2004). doi: 10.1145/1015706.1015815 CrossRefGoogle Scholar
  16. 16.
    Mesh Repairing Software on the Web:
  17. 17.
  18. 18.
    Burger, W., Burge, M.J.: Digital Image Processing - An Algorithmic Introduction Using Java. Texts in Computer Science, 1st edn. Springer-Verlag, London (2008)Google Scholar
  19. 19.
    Wu, Z., Sullivan, J.M.: Multiple material marching cubes algorithm. Int. J. Numer. Meth. Eng. 58(2), 189–207 (2003). doi: 10.1002/nme.775 zbMATHCrossRefGoogle Scholar
  20. 20.
    Agrawal, N., Kimura, Y., Arghavani, R., Datta, S.: Impact of transistor architecture (bulk planar, trigate on bulk, ultrathin-body planar SOI) and material (silicon or III-V semiconductor) on variation for logic and SRAM applications. IEEE Trans. electron devices 60(10), 3298–3304 (2013). doi: 10.1109/TED.2013.2277872 CrossRefGoogle Scholar
  21. 21.
    Modzelewski, K., Chintala, R., Moolamalla, H., Parke, S., Hackler, D.: Design of a 32nm independently-double-gated FlexFET SOI transistor. In: Proceedings of the 17th Biennial University/Government/Industry Micro/Nano Symposium, pp. 64–67 (2008) doi: 10.1109/UGIM.2008.24

Copyright information

© Springer International Publishing Switzerland 2015

Authors and Affiliations

  • Florian Rudolf
    • 1
  • Josef Weinbub
    • 1
  • Karl Rupp
    • 1
    • 2
  • Peter Resutik
    • 1
  • Andreas Morhammer
    • 3
  • Siegfried Selberherr
    • 1
  1. 1.Institute for MicroelectronicsTU WienViennaAustria
  2. 2.Institute for Analysis and Scientific ComputingTU WienViennaAustria
  3. 3.Christian Doppler Laboratory for Reliability Issues in Microelectronics, Institute for MicroelectronicsTU WienViennaAustria

Personalised recommendations