Advertisement

Reflection Mode Imaging with Extreme-Ultraviolet Light from a High Harmonic Source

  • Dennis F. Gardner
  • Bosheng Zhang
  • Matthew D. Seaberg
  • Elisabeth R. Shanblatt
  • Henry C. Kapteyn
  • Margaret M. Murnane
  • Daniel E. Adams
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 169)

Abstract

To date there have been few demonstrations of reflection-geometry coherent diffractive imaging (CDI). The work described here, using a high-harmonic source at 30nm, is the first general reflection mode technique. We use a combination of ptychography and tilted plane correction to image an extended sample with no restriction on the incident angle or limitations on the numerical aperture. We find good agreement between our CDI images and images from scanning electron microscopy and atomic force microscopy.

Keywords

Atomic Force Microscope Numerical Aperture High Harmonic Generation Reflection Geometry Curve Mirror 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

  1. 1.
    Miao, J., Charalambous, P., Kirz, J., Sayre, D.: Extending the methodology of X-ray crystallography to allow imaging of micrometre-sized noncrystalline specimens. Nature 400, 342–344 (1999)Google Scholar
  2. 2.
    Chapman, H.N., Nugent, K.A.: Coherent lensless X-ray imaging. Nat. Photonics 4, 833–839 (2010)Google Scholar
  3. 3.
    Marathe, S., Kim, S.S., Kim, S.N., Kim, C., Kang, H.C., Nickels, P.V., Noh, D.Y.:Coherent diffraction surface imaging in reflection geometry. Opt. Express 18, 7253–7262 (2010)Google Scholar
  4. 4.
    Roy, S., Parks, D., Seu, K.A., Su, R., Turner, J.J., Chao, W., Anderson, E.H., Cabrini, S., Kevan, S.D.: Lensless X-ray imaging in reflection geometry. Nat. Photonics 5, 243–245 (2011)Google Scholar
  5. 5.
    Gardner, D.F., Zhang, B., Seaberg, M.D., Martin, L.S., Adam, D.E., Salmassi, F., Gullikson, E., Kapteyn, H., Murnane, M.: High numerical aperture reflection mode coherent diffraction microscopy using off-axis apertured illumination. Opt. Express 20, 19050–19059 (2012)Google Scholar
  6. 6.
    Claus, D., Robinson, D.J., Chetwynd, D.G., Shuo, Y., Pike, W.T., De J Toriz Garcia, J.J., Rodenburg, J.M.: Dual wavelength optical metrology using ptychography. J. Opt. 15, 035702 (2013)Google Scholar
  7. 7.
    Zürch, M., Kern, C., Spielmann, C.: XUV coherent diffraction imaging in reflection geometry with low numerical aperture. Opt. Express 21, 21131–21147 (2013)Google Scholar
  8. 8.
    Harada, T., Nakasuji, M., Nagata, Y., Watanabe, T., Kinoshita, H.: Phase imaging of extremeultraviolet mask using coherent extreme-ultraviolet scatterometry microscope. Jpn. J. Appl. Phys. 52 06GB02 (2013)Google Scholar
  9. 9.
    Sun, T., Jiang, Z., Strzalka, J., Ocola, L., Wang, J.: Three-dimensional coherent X-ray surface scattering imaging near total external reflection. Nature Photonics 6, 586–590 (2012)Google Scholar
  10. 10.
    Thibault, P., Dierolf, M., Bunk, O., Menzel, A., Pfeiffer, F.: Probe retrieval in ptychographic coherent diffractive imaging. Ultramicroscopy 109, 338–343 (2009)Google Scholar
  11. 11.
    Maiden, A., Rodenburg, J.: An improved ptychographical phase retrieval algorithm for diffractive imaging. Ultramicroscopy 109, 1256–1262 (2009)Google Scholar
  12. 12.
    Bartels, R.A., Paul, A., Green, H., Kapteyn, H.C., Murnane, M.M., Backus, S., Christov, I.P., Liu, Y., Attwood, D., Jacobsen, C.: Generation of spatially coherent light at extreme ultraviolet wavelengths. Science 297, 376–378 (2002)Google Scholar
  13. 13.
    Popmintchev, T., et al.: Bright coherent ultrahigh harmonics in the keV x-ray regime from mid-infrared femtosecond lasers. Science 336, 1287–1291 (2012)Google Scholar
  14. 14.
    Seaberg, M.D., Zhang, B., Gardner, D.F., Shanblatt, E.R., Murnane, M.M., Kapteyn, H.C., Adams, D.E.: Tabletop nanometer extreme ultraviolet imaging in an extended reflection mode using coherent Fresnel ptychography. Optica 1, (in press) (2014)Google Scholar
  15. 15.
    Williams, G., Quiney, H., Dahl, B., Tran, C., Peele, A.G., Nugent, K., DeJonge M., Paterson, D.: Curved beam coherent diffractive imaging. Thin Solid Films 515, 5553–5556 (2007)Google Scholar
  16. 16.
    Zhang, F., Peterson, I., Vila-Comamala, J., Diaz, A., Berenguer, F., Bean, R., Chen, B., Menzel, A., Robinson, I., Rodenburg, J.: Translation position determination in ptychographic coherent diffraction imaging. Opt. Express 21, 13592–13606 (2013)Google Scholar

Copyright information

© Springer International Publishing Switzerland 2016

Authors and Affiliations

  • Dennis F. Gardner
    • 1
  • Bosheng Zhang
    • 1
  • Matthew D. Seaberg
    • 1
  • Elisabeth R. Shanblatt
    • 1
  • Henry C. Kapteyn
    • 1
  • Margaret M. Murnane
    • 1
  • Daniel E. Adams
    • 1
  1. 1.JILAUniversity of Colorado at BoulderBoulderUSA

Personalised recommendations