Design and Analysis of a Novel XY Micro-positioning Stage Used Corrugated Flexure Beams

  • Nianfeng Wang
  • Xiaohe Liang
  • Xianmin Zhang
Part of the Lecture Notes in Computer Science book series (LNCS, volume 8918)


This paper presents the design and analysis of a novel XY micro-positioning stage which is driven by noncontact force provided by electromagnetic actuators. The stage is constructed with eight pieces of flexure structure, the corrugated flexure beam (CF beam), which have a large range of motion. Through the empirical equations, a set of optimized parameters of CF beam are decided. Then the static and modal analysis of the stage are conducted by finite element analysis(FEA) via Workbench, which validate the characteristic of large range of motion and work out its stiffness and natural frequency. The relationship between the displacement of the proposed micro-positioning stage and the exciting current is discussed.


Micro-positioning stage corrugated flexure beams flexure joint 


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Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  • Nianfeng Wang
    • 1
  • Xiaohe Liang
    • 1
  • Xianmin Zhang
    • 1
  1. 1.Guangdong Province Key Laboratory of Precision Equipment and Manufacturing TechnologySouth China University of TechnologyGuangzhouPR China

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