Laser-Induced Local Oxidation of Thin Metal Films: Physical Fundamentals and Applications

Chapter

Abstract

Local laser oxidation of thin metal films allows recording of an optical image on thin films with the highest resolution and high productivity at the same time, and without distortions specific to laser ablation. A technique for writing of diffractive optical elements was developed on the basis of this process. Laser-matter interaction physics and laser technology underlying this method are described in this chapter.

References

  1. 1.
    V.P. Veiko, M.N. Libenson, Vop. Radioelectroniki 3(5), 99 (1964)Google Scholar
  2. 2.
    V.P. Veiko, G.A. Kotov, M.N. Libenson, M.N. Nikitin, in Physico- Technical Basis of Laser Technology, Proceedings School, Leningrad, USSR, 1979 (LDNTP. Leningrad, 1970, 1979), p. 43Google Scholar
  3. 3.
    V.P. Veiko, G.A. Kotov, M.N. Libenson, M.N. Nikitin, Dokl. Akad. Nauk. SSSR 208, 587 (1973). [Engl. transl.: Sov. Phys.-Dokl 18, 83 (1973)]Google Scholar
  4. 4.
    V.P. Veiko, G.A. Kotov, M.N. Libenson, Elektronnaya Tekh. Microelectronica 3(4), 48 (1973)Google Scholar
  5. 5.
    G.A. Kotov, M.N. Libenson, Elektronnaya Tekh. Microelectronica 3(4), 56 (1973)Google Scholar
  6. 6.
    V.P. Koronkevich, A.G. Poleshchuk, E.G. Churin, Yu. Yurlov, Kvant. Elektron. 12(4), 755–761 (1985). [Engl. Transl. Sov. J. Quant. Electr. 15, 497 (1985)]Google Scholar
  7. 7.
    V.V. Cherkashin, E.G. Churin, V.P. Korolkov, V.P. Koronkevich, A.A. Kharissov, A.G. Poleshchuk, J.H. Burge, Proc. SPIE. 3010, 168 (1997)Google Scholar
  8. 8.
    F.V. Bunkin, N.A. Kirichenko, B.S. Luk’yanchuk, Usp. Fiz. Nauk 138, 45(1982). [Engl. trasl.: Sov. Phys. - Usp. 138, (1982)]Google Scholar
  9. 9.
    D. Bauerle, Chemical Processing with Lasers, Springer Series in Material Science, vol. 1 (Springer, Heidelberg, 1986)Google Scholar
  10. 10.
    K.G. Ibbs, R.M. Osgood (eds.), Laser Chemical Processing for Microelectronics (Cambridge University Press, Cambridge, 1989)Google Scholar
  11. 11.
    V.P. Veiko, S.M. Metev, Laser-Assisted Microtechnology, Springer Series Materials Science, vol. 19 (Springer, Heidelberg, 1994, 1998)Google Scholar
  12. 12.
    A.M. Bonch-Bruevich, M.N. Libenson, Izvestiya Akad. Nauk SSSR, ser. Phys. 46(6), 1104 (1982) (in Russian)Google Scholar
  13. 13.
    I.N. Goncharov, A.A. Gorbunov, V.I. Konov, A.S. Silenok, Yu.A. Skvortsov, V.N. Tokarev, N.I. Chapliev, preprint FIAN USSR No. 76 (1980)Google Scholar
  14. 14.
    V.A. Bobyrev, F.V. Bunkin, N.A. Kirichenko, B.S. Luk’yanchuk, A.V. Simakin, Kvant. Elektron. 9, 45 (1982), [Engl. Transl. Sov. J. Quant. Electr. 12, 4 (1982)]Google Scholar
  15. 15.
    Konov V.I., Laser Photonics Reviews, 1–28, 2012/DOI 10.1002/lpor.201100030)Google Scholar
  16. 16.
    P. Veiko, A.A. Slobodov, G.V. Odintsova, Laser Phys. 23(6), 066001 (2013)Google Scholar
  17. 17.
    S.M. Metev, K.V. Savchenko, K.V. Stamenov, V.P. Veiko, G.A. Kotov, G.D. Shandibina, IEEE J. Quant. Electr. 17, 2004 (1981)CrossRefADSGoogle Scholar
  18. 18.
    R.B. Gerassimov, S.M. Metev, K.V. Savchenko, J. Phys. D 17, 1671 (1984)CrossRefADSGoogle Scholar
  19. 19.
    V.P. Veiko, G.A. Kotov, V.A. Smirnov, G.D. Shandibina, E.B. Yakovlev, Kvant. Elektron. 7, 2196 (1981). [English transl.: Sov. J. Quant. Electr. 11, 1338 (1981)]Google Scholar
  20. 20.
    V.P. Koronkevich, A.G. Poleshchuk, E.G. Churin, Yu. Yurlov, Pis’ma v “Zhurnal tehnicheskoi fiziki” 11, 144–148. [Engl. Transl. (Sov. Technical Physics Letters) 11, (1985)]Google Scholar
  21. 21.
    V.P. Veiko, M.N. Libenson, Vop. Radioelectroniki 3(4), 20 (1966)Google Scholar
  22. 22.
    V.P. Veiko, M.N. Libenson, Fiz. Khim. Obrab. Mater. 4, 44 (1968)Google Scholar
  23. 23.
    V.P. Veiko, E.A. Touchkova, E.B. Yakovlev, Kvant. Elektron. 11(4), 661 (1981). [English transl.: Sov. J. Quant. Electr. 11, (1981)]Google Scholar
  24. 24.
    V.P. Veiko, Laser Treatment of Thin-Films for Microelectronics (Mashinostroenie, Leningrad, 1986). (in Russian)Google Scholar
  25. 25.
    A.G. Poleshchuk, E.G. Churin, V.P. Koronkevich, V.P. Korolkov, A.A. Kharisov, V.A. Cherkashin, V.A. Kirianov, A.V. Kirianov, S.A. Kokarev, A.G. Verhoglad, Appl. Optics. 38(8), 1295 (1999)Google Scholar
  26. 26.
    J.H. Burge, Proc. of SPIE. 2576, 258 (1995)CrossRefADSGoogle Scholar
  27. 27.
    J.H. Burge, L.R. Dettmann, S.C. West, OSA Trends Opt. Photonics 24, 182 (1999)Google Scholar
  28. 28.
    V.P. Koronkevich, V.P. Kirianov, V.P. Kokoulin, I.G. Palchikova, A.G. Poleshchuk, A.G. Sedukhin, E.G. Churin, A.M. Sherbachenko, Yi. I. Yurlov. Optik 67(3), 257 (1984)Google Scholar
  29. 29.
    V.P. Korolkov, A.G. Poleshchuk, Proc. SPIE 6732, 67320X (2007)CrossRefGoogle Scholar
  30. 30.
    U.C. Paek, A. Kestenbaum, J. Appl. Phys. 44, 2260 (1973)CrossRefADSGoogle Scholar
  31. 31.
    A.G. Poleshchuk, Optoelectr. Instrum. Data Process. 39(6), 34 (2003)Google Scholar
  32. 32.
    V.P. Veyko, E.A. Shakhno, A.G. Poleshchuk, V.P. Korolkov, V. Matyzhonok, JLMN J. Laser Micro/Nanoeng. 3(3), 201 (2008)CrossRefGoogle Scholar
  33. 33.
    A.G. Poleshchuk, V.P. Korolkov, V.V. Cherkashin, S. Reichelt, J.H. Burge, Optoelectron. Instrum. Data Process. (Avtometriya) 38(3), 3 (2003). (in Russian)Google Scholar
  34. 34.
    J.H. Burge, V.V. Cherkashin, V.P. Koronkevich, A.G. Poleshchuk, in Proceedings of VI International conference “Applied Optics”, vol. 3 (St. Petersburg, 2004), p. 203Google Scholar
  35. 35.
    G. Olczak, C. Wells, D. Fischer, M. Connoly, Proc. SPIE 8450, 84500R (2012)CrossRefADSGoogle Scholar
  36. 36.
    N.A. Kirichenko, B.S. Luk’yanchuk, Kvant. Elektron. 10, 4 (1983). [Engl. Transl. Sov. J. Quant. Electr. 13, 4 (1983)]Google Scholar
  37. 37.
    V. P. Veyko, E. A. Shakhno, D.A. Sinev., A. G. Poleshchuk, A.R.Sametov, A.G. Sedukhin, Comput. Optics. 36(2(84)), 562 (2012). (in Russian)Google Scholar
  38. 38.
    V.P. Veyko, M.V. Yarchuk, M.V., A.I. Ivanov A.I., Laser Phys. 22(8), 1310 (2012)Google Scholar
  39. 39.
    A.V. Baranov, K.V. Bogdanov, A.V. Fedorov, M.V. Yarchuk, A.I. Ivanov, V.P. Veiko, K. Berwick, J. Raman Spectrosc. 42(10), 1780 (2011)Google Scholar
  40. 40.
    J. Benard, Oxydation des Metaux (Villars, Paris, 1964)Google Scholar

Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  1. 1.Mechanics and Optics Chair of Laser Technologies and Applied EcologySt. Petersburg National Research University of Information TechnologiesSt. PetersburgRussian Federation
  2. 2.Institute of Automation and Electrometry Siberian Branch of Russian Academy of ScienceNovosibirskRussian Federation

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