Laser-Induced Local Oxidation of Thin Metal Films: Physical Fundamentals and Applications

Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 195)


Local laser oxidation of thin metal films allows recording of an optical image on thin films with the highest resolution and high productivity at the same time, and without distortions specific to laser ablation. A technique for writing of diffractive optical elements was developed on the basis of this process. Laser-matter interaction physics and laser technology underlying this method are described in this chapter.


Dioxide Chromium Recrystallization Peaked 



Authors wish to thank collaborators who have contributed to our research efforts in this field and, in particular, Dr. Elena A. Shakchno, Michail V. Yarchuk, Dmitry A. Sinev from St-Petersburg National Research University of Information Technologies, Mechanics and Optics, and Voldemar P. Koronkevich, Viktor P. Korolkov, Evgeny G. Churin, Vadim Cherkashin, Anatoly I. Malyshev from Institute of Automation and Electrometry , Russian Academy of Sciences, Siberian Branch.

This study was supported by the Russian Federation Presidential Grant for leading scientific school SS–619.2012.2 and the Russian Foundation for Basic Research Grants 12–02–00974a, No 12–02–01118a and No 13–02–00971.


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© Springer International Publishing Switzerland 2014

Authors and Affiliations

  1. 1.Mechanics and Optics Chair of Laser Technologies and Applied EcologySt. Petersburg National Research University of Information TechnologiesSt. PetersburgRussian Federation
  2. 2.Institute of Automation and Electrometry Siberian Branch of Russian Academy of ScienceNovosibirskRussian Federation

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