Advertisement

Coherent Short-Wavelength Plasma Radiation for Lab-scale Nano-inspection Tools

  • Davide Bleiner
Part of the Springer Proceedings in Physics book series (SPPHY, volume 147)

Abstract

Coherent short-wavelength plasma radiation demonstrated a number of advantages for nano-inspection. Contending technologies are here discussed and strategies for X-ray laser optimizations are highlighted, thus bridging the gap between proof-of-principle or enabling tools.

Keywords

Capillary Discharge Electron Density Gradient Grip Condition Metrology Tool Cylinder Target 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgements

The present work was supported by the Swiss National Science Foundation under the grant number PP00P2-133564/1. Contributions from F. Staub, J.E. Balmer, L. Masoudnia, M. Ruiz-Lopez, Th. Feurer are acknowledged.

References

  1. 1.
    Curtis, A.H., Reagan, B.A., Wernsing, K.A., Furch, F.J., Luther, B.M., Rocca, J.J.: Opt. Lett. 36, 2164 (2011) ADSCrossRefGoogle Scholar
  2. 2.
    Oliva, E., Zeitoun, Ph., Sebban, S., Fajardo, M., Velarde, P., Cassou, K., Ros, D.: Opt. Lett. 34, 2640 (2009) ADSCrossRefGoogle Scholar
  3. 3.
    Bleiner, D., Balmer, J.E., Staub, F.: Appl. Opt. 50, 6689 (2011) ADSCrossRefGoogle Scholar
  4. 4.
    Ruiz-Lopez, M., Staub, F., Bleiner, D.: Optical correction of X-ray laser illumination for short-wavelength microscopy. In: Sebban, S., et al. (eds.) X-Ray Lasers 2012. Springer Proceedings in Physics, vol. 147. Springer, Cham (2013). Chapter 36 in this book Google Scholar
  5. 5.
    Guilbaud, O., et al.: Opt. Lett. 35, 1326 (2010) ADSCrossRefGoogle Scholar
  6. 6.
    Tuemmler, J., Jung, R., Stiel, H., Nickles, P.V., Sandner, W.: Opt. Lett. 34, 1378 (2009) ADSCrossRefGoogle Scholar
  7. 7.
    Bleiner, D.: Saturation gain-length product during short-wavelength plasma lasing. Appl. Phys. Lett. 101, 081105 (2012) ADSCrossRefGoogle Scholar
  8. 8.
    Masoudnia, L., Bleiner, D.: Hohlraum target for overcoming refractive losses in plasma x-ray lasers. Laser Phys. (IOP) 23, 056003 (2013) CrossRefGoogle Scholar
  9. 9.
    Fill, E.E.: Opt. Commun. 67, 441 (1998) ADSCrossRefGoogle Scholar
  10. 10.
    Weber, R., Cunningham, P.F., Balmer, J.E.: Appl. Phys. Lett. 53, 2596 (1988) ADSCrossRefGoogle Scholar
  11. 11.
    Rocca, J.J.: Rev. Sci. Instrum. 70, 3799 (1999) ADSCrossRefGoogle Scholar

Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  1. 1.Institute of Applied PhysicsUniversity of BernBernSwitzerland

Personalised recommendations