Coherent Short-Wavelength Plasma Radiation for Lab-scale Nano-inspection Tools

Part of the Springer Proceedings in Physics book series (SPPHY, volume 147)

Abstract

Coherent short-wavelength plasma radiation demonstrated a number of advantages for nano-inspection. Contending technologies are here discussed and strategies for X-ray laser optimizations are highlighted, thus bridging the gap between proof-of-principle or enabling tools.

References

  1. 1.
    Curtis, A.H., Reagan, B.A., Wernsing, K.A., Furch, F.J., Luther, B.M., Rocca, J.J.: Opt. Lett. 36, 2164 (2011) ADSCrossRefGoogle Scholar
  2. 2.
    Oliva, E., Zeitoun, Ph., Sebban, S., Fajardo, M., Velarde, P., Cassou, K., Ros, D.: Opt. Lett. 34, 2640 (2009) ADSCrossRefGoogle Scholar
  3. 3.
    Bleiner, D., Balmer, J.E., Staub, F.: Appl. Opt. 50, 6689 (2011) ADSCrossRefGoogle Scholar
  4. 4.
    Ruiz-Lopez, M., Staub, F., Bleiner, D.: Optical correction of X-ray laser illumination for short-wavelength microscopy. In: Sebban, S., et al. (eds.) X-Ray Lasers 2012. Springer Proceedings in Physics, vol. 147. Springer, Cham (2013). Chapter 36 in this book Google Scholar
  5. 5.
    Guilbaud, O., et al.: Opt. Lett. 35, 1326 (2010) ADSCrossRefGoogle Scholar
  6. 6.
    Tuemmler, J., Jung, R., Stiel, H., Nickles, P.V., Sandner, W.: Opt. Lett. 34, 1378 (2009) ADSCrossRefGoogle Scholar
  7. 7.
    Bleiner, D.: Saturation gain-length product during short-wavelength plasma lasing. Appl. Phys. Lett. 101, 081105 (2012) ADSCrossRefGoogle Scholar
  8. 8.
    Masoudnia, L., Bleiner, D.: Hohlraum target for overcoming refractive losses in plasma x-ray lasers. Laser Phys. (IOP) 23, 056003 (2013) CrossRefGoogle Scholar
  9. 9.
    Fill, E.E.: Opt. Commun. 67, 441 (1998) ADSCrossRefGoogle Scholar
  10. 10.
    Weber, R., Cunningham, P.F., Balmer, J.E.: Appl. Phys. Lett. 53, 2596 (1988) ADSCrossRefGoogle Scholar
  11. 11.
    Rocca, J.J.: Rev. Sci. Instrum. 70, 3799 (1999) ADSCrossRefGoogle Scholar

Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  1. 1.Institute of Applied PhysicsUniversity of BernBernSwitzerland

Personalised recommendations