Coherent Short-Wavelength Plasma Radiation for Lab-scale Nano-inspection Tools

  • Davide Bleiner
Part of the Springer Proceedings in Physics book series (SPPHY, volume 147)


Coherent short-wavelength plasma radiation demonstrated a number of advantages for nano-inspection. Contending technologies are here discussed and strategies for X-ray laser optimizations are highlighted, thus bridging the gap between proof-of-principle or enabling tools.


Capillary Discharge Electron Density Gradient Grip Condition Metrology Tool Cylinder Target 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



The present work was supported by the Swiss National Science Foundation under the grant number PP00P2-133564/1. Contributions from F. Staub, J.E. Balmer, L. Masoudnia, M. Ruiz-Lopez, Th. Feurer are acknowledged.


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Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  1. 1.Institute of Applied PhysicsUniversity of BernBernSwitzerland

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