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Hydrogen in Silicon: Evidence of Independent Monomeric States

  • V. V. VoronkovEmail author
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Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 296)

Abstract

The data on hydrogen in saturated/quenched samples and in samples exposed to plasma have been revisited. It is concluded that the monomeric hydrogen in intrinsic silicon is represented mostly by two neutral species: Hb (presumably a ground state of tetrahedral hydrogen) and Hs (a slow monomer in a different interstitial position). At high T these species are in equilibrium, with a concentration ratio close to 1. At lower T (at least at T ≤ 500 °C) they become independent one of the other. This conclusion differs from a conventional notion that considers bond-centred H+(BC) ions to be dominant in intrinsic Si. In p-Si, boron is passivated not only by H+(BC) ions (denoted H+(1)) but also by another kind of H+ denoted H+(2). A presence of several independent species (Hb, Hs, H+(1) and H+(2)) gives rise to a rich variety of hydrogen depth profiles in plasma-exposed silicon; these profiles are well reproduced by simulations.

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© Springer Nature Switzerland AG 2020

Authors and Affiliations

  1. 1.Global WafersMeranoItaly

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