2-D Acoustic Particle Velocity Sensors Based on a Commercial Post-CMOS MEMS Technology
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A 2-dimensional acoustic sensor with programmable directivity is proposed. The sensor is formed by the combination of two orthogonal detectors of acoustic particle velocity. Differently from previous versions, the proposed device is fabricated using a commercially available post-CMOS technology, opening the way to low cost applications. Characterization of the frequency response and directivity is presented. The possibility of producing a sensor with electronically programmable directivity is demonstrated.
This research has been supported by DELTATECH Italy and the Italian municipality of Sogliano al Rubicone (Italy) in the framework of the SIHT (Sogliano Industrial High Technology) project.
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