Optical Fiber Pressure Sensor Based on Corrugated Diaphragm Structure

  • Lin ZhaoEmail author
  • Jiqiang Wang
  • Long Jiang
  • Lianqing Li
Conference paper
Part of the Advances in Intelligent Systems and Computing book series (AISC, volume 1084)


Aiming at the current pressure monitoring requirement in the energy and chemical industry, combined with the principle of fiber double grating sensing, a fiber optic pressure sensor is designed and developed to meet practical engineering applications. Using corrugated diaphragm pressure sensor structure, the sensor monitoring sensitivity is improved, reducing the monitoring error caused by pressure multi-stage conduction and material expansion and contraction of the traditional diaphragm pressure sensor, and improving the overall stability of the sensor. At the same time, the sensor adopts double grating temperature compensation model, which solves the cross-sensitivity of temperature to pressure measurement and realizes temperature self-compensation of pressure measurement. The experimental results show that the sensor monitoring sensitivity is 0.078 kPa/pm, the monitoring error is \( < \)0.5 kPa, and it has good linearity and long-term reliability. It is especially suitable for pressure monitoring of flammable and explosive environments such as petroleum, coal and chemical industry, and has good application prospects.


Fiber Bragg grating Pressure sensor Corrugated diaphragm Linearity Reliability 



This work was financially supported by Shandong key research and development plan (2017GSF20102) and Shandong Natural Science Foundation (ZR2016QZ006).


  1. 1.
    Jun, H.: Development and Application of Fiber Bragg Grating. Master’s Degree Thesis of Wuhan University of Technology (2013)Google Scholar
  2. 2.
    Chen, L., Zhu, J., Li, Z., Wang, M.: Optical fiber fabry-perot pressure sensor using corrugated diaphragm. Acta Optica Sinica 36(3), 0306002 (2016)Google Scholar
  3. 3.
    Zhang, W., Jiang, J., Wang, S.: Fiber-optic fabry-perot high-pressure sensor for marine applications. Acta Optica Sinica 37(2), 0206001 (2017)CrossRefGoogle Scholar
  4. 4.
    Ge, Y., Wang, M., Yan, H.: Optical MEMS pressure sensor based on a mesa-diaphragm structure. Opt. Express 16(26), 21746–21752 (2008)CrossRefGoogle Scholar
  5. 5.
    Wang, X., Li, B., Russo, O.L., et al.: Diaphragm design guidelines and an optical pressure sensor based on MEMS technique. Microelectron. J. 37(1), 50–56 (2006)CrossRefGoogle Scholar
  6. 6.
    Wang, Y., Wang, M., Ni, X., Xia, W.: An optical fiber MEMS pressure sensor using microwave photonics filtering technique. In: 25th International Conference on Optical Fiber Sensors, p. 1032368 (2017)Google Scholar
  7. 7.
    Liao, Y.: Optical Fiber of Light, pp. 197–202. Tsinghua University, Beijing (2000)Google Scholar
  8. 8.
    Fu, T.: Research on FBG Pressure Sensor With Temperature Compensation. Master’s Degree Thesis of Chengdu University of Electronic Science and Technology (2014)Google Scholar
  9. 9.
    Li, X., Zhang, B., Yao, J., Hu, J.: Theoretical analyses on parameter option of a pressure fiber sensor. Chin. J. Sens. Actuators 1, 133–135 (2004)Google Scholar
  10. 10.
    Tan, B.: A high sensitivity fiber grating pressure sensor. J. Optoelectron. Laser 23(11), 2012–2105 (2012)Google Scholar
  11. 11.
    Gao, Y., Liu, C., Mu, H.: Pressure response of fiber Bragg grating based on plate diaphragm and equal-strength cantilever. Opt. Instrum. 36(4), 333–336 (2014)Google Scholar

Copyright information

© Springer Nature Switzerland AG 2020

Authors and Affiliations

  • Lin Zhao
    • 1
    Email author
  • Jiqiang Wang
    • 1
  • Long Jiang
    • 1
  • Lianqing Li
    • 1
  1. 1.Laser InstituteQilu University of Technology (Shandong Academy of Sciences)JinanChina

Personalised recommendations