Advertisement

Accuracy: The Next Opportunity for MEMS

  • Andrea OnettiEmail author
Chapter

Abstract

Microelectromechanical systems (MEMS) experienced a huge growth in recent years, thanks to the widespread adoption in personal electronics. Driven by demanding consumer applications, the accuracy of MEMS-based devices is now in line with the requirements of industrial and automotive markets, thus opening new business opportunities. STMicroelectronics portfolio of MEMS devices leverages the company 20 years-long experience to provide tailored solutions that balance performance trade-offs to best address different market segments. This paper presents the main opportunities for MEMS-based devices in the fields of smart industry and smart driving and discusses the key parameters that qualify high-accuracy sensors: noise, stability and tolerance. The ASM330LHH, a 6× Inertial Measurement Unit for automotive applications, is presented as the basis for discussing main IC design guidelines to obtain superior performance.

Keywords

Sensor MEMS Accuracy Calibration Actuator 

References

  1. 1.
  2. 2.
  3. 3.
    S. Facchinetti et al., Development of a complete model to evaluate the zero rate level drift over temperature in Coriolis vibrating gyroscopes, in 2017 IEEE Inertial Sensors & Systems, Conference Proceeding (IEEE, Piscataway, 2017), pp. 125–128Google Scholar

Copyright information

© Springer Nature Switzerland AG 2020

Authors and Affiliations

  1. 1.AMS MEMS Sensors DivisionSTMicroelectronicsMilanItaly

Personalised recommendations