Design and Built of a Micro-Tribometer with High Vacuum and Low Temperature

  • Pu Wu
  • Chenhui ZhangEmail author
  • Jianbin Luo
Conference paper
Part of the Mechanisms and Machine Science book series (Mechan. Machine Science, volume 73)


With the imperious demands for reducing friction and wear under special working conditions, it need to devote more efforts to develop tribometer with various testing environment such as high vacuum and low temperature. In this work, a novel micro-tribometer has been designed and built with a resolution of friction force better than 10-4 N. A double leaf cantilever was employed as force senor and the corresponding deformation was measured by a laser interferometer. The lowest sample temperature was about 5 K which was achieved by GM refrigerators. And the precision of temperature control was about ± 0.1 K. The highest vacuum of the experimental chamber was up to 5×10-5 Pa, which was realized by a turbo pump and a mechanical pump. In the testing of the tribometer, sample temperature of about 5 K and chamber vacuum of about 2.04 × 10-5 Pa has been obtained. In addition, the resolution of friction force was about 6.9 × 10-5 N.


Tribometer High Vacuum Low Temperature 


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  1. 1.
    Marchetto, D., Benzig, R., Korres, S., Dienwiebel, M.: Design and testing of ultrahigh vacuum microtribometer. Tribology - Materials, Surfaces & Interfaces 6(3), 95–101 (2013).Google Scholar
  2. 2.
    Liu, Y., Gubisch, M., Haensel, T., Spiess, L., Schaefer, J. A.: Evaluation of the friction of WC/DLC solid lubricating films in vacuum. Tribology International 39(12), 1584–1590 (2006).Google Scholar
  3. 3.
    Krick, B. A., Sawyer, W. G.: Space tribometers: design for exposed experiments on orbit. Tribology Letters 41(1), 303–311 (2011).Google Scholar
  4. 4.
    Goto, M., Nakata, N., Honda, F.: Tribological behavior of an ag sub-nanometer-thick film on an si (111) 7 × 7 surface at elevated temperatures. Wear 256(7–8), 726–734 (2004).Google Scholar
  5. 5.
    Gradt, T., Borner, H., Schneider, T.: Low temperature tribometers and the behaviour of adlc coatings in cryogenic environment. Tribology International 34(4), 225–230 (2001).Google Scholar
  6. 6.
    Colbert, R. S., Sawyer, W. G.: Thermal dependence of the wear of molybdenum disulphide coatings. Wear 269(11), 719–723 (2010).Google Scholar
  7. 7.
    Ostrovskaya, Y. L., Yukhno, T. P., Gamulya, G. D., Vvedenskij, Y. V., Kuleba, V. I.: Low temperature tribology at the b. verkin institute for low temperature physics & engineering (historical review). Tribology International 34(4), 265–276 (2001).Google Scholar

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© Springer Nature Switzerland AG 2019

Authors and Affiliations

  1. 1.State Key Laboratory of TribologyTsinghua UniversityBeijingChina

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