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Compliant Mechanisms for Ultra-Precise Applications

  • René TheskaEmail author
  • Lena Zentner
  • Thomas Fröhlich
  • Christian Weber
  • Eberhard Manske
  • Sebastian Linß
  • Philipp Gräser
  • Felix Harfensteller
  • Maximilian Darnieder
  • Michael Kühnel
Conference paper
Part of the Mechanisms and Machine Science book series (Mechan. Machine Science, volume 71)

Abstract

This paper reports about enhanced compliant mechanisms with flexure hinge based on new analytic and/or FEM models that have been manufactured by state of the art wire EDM technology. Experimental proofs at test benches, equipped with ultra-precise interferometer based length and angular measurement systems, show first time the residual deviation to the intended path of motion with a resolution of nanometers/arc seconds. Theoretically determined and measured data are in good correlation. Repeatability limitations are rather more given by the residual noise of the overall test arrangement and mainly not by the mechanism itself.

Keywords

Compliant mechanism Ultra-precise applications Flexure hinge Nanopositioning Nanomeasurement Precision engineering 

Notes

Acknowledgements

This project is supported by the Deutsche Forschungsgemeinschaft (DFG) under Grant No. TH 845/5-1, TH 845/7-1, FR 2779/6-1 and ZE 714/10-1.

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Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • René Theska
    • 1
    Email author
  • Lena Zentner
    • 2
  • Thomas Fröhlich
    • 3
  • Christian Weber
    • 4
  • Eberhard Manske
    • 5
  • Sebastian Linß
    • 2
  • Philipp Gräser
    • 1
  • Felix Harfensteller
    • 4
  • Maximilian Darnieder
    • 1
  • Michael Kühnel
    • 3
  1. 1.Precision Engineering Group, Department of Mechanical EngineeringInstitute of Design and Precision Engineering, Technische Universität IlmenauIlmenauGermany
  2. 2.Compliant Systems Group, Department of Mechanical EngineeringTechnische Universität IlmenauIlmenauGermany
  3. 3.Process Measurement Group, Department of Mechanical EngineeringInstitute of Process Measurement and Sensor Technology, Technische Universität IlmenauIlmenauGermany
  4. 4.Engineering Design Group, Department of Mechanical EngineeringInstitute of Design and Precision Engineering, Technische Universität IlmenauIlmenauGermany
  5. 5.Production and Precision Measurement, Department of Mechanical EngineeringInstitute of Process Measurement and Sensor Technology, Technische Universität IlmenauIlmenauGermany

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