Advances in Fs-Laser Micromachining Towards the Development of Optofluidic Devices

  • João M. MaiaEmail author
  • Vítor A. Amorim
  • D. Alexandre
  • P. V. S. Marques
Part of the Springer Series in Optical Sciences book series (SSOS, volume 222)


In this chapter the developments made in femtosecond laser micromachining for applications in the fields of optofluidics and lab-on-a-chip devices are reviewed. This technology can be applied to a wide range of materials (glasses, crystals, polymers) and relies on a non-linear absorption process that leads to a permanent alteration of the material structure. This modification can induce, for instance, a smooth variation of the refractive index or generate etching selectivity, which can be used to form integrated optical circuits and microfluidic systems, respectively. Unlike conventional techniques, fs-laser micromachining offers a way to produce high-resolution three-dimensional components and integrate them in a monolithic approach. Recent advances made in two-photon polymerization have also enabled combination of polymeric structures with microfluidic channels, which can provide additional functionalities, such as fluid transport control. In particular, here it is emphasised the integration of microfluidic systems with optical layers and polymeric structures for the fabrication of miniaturized hybrid devices for chemical synthesis and biosensing.


Microfabrication Fs-laser writing Chemical etching Two-photon polymerization Optical waveguides Microfluidics Optofluidics Optical sensing Fused silica 



Project “NanoSTIMA: Macro-to-Nano Human Sensing Towards Integrated Multimodal Health Monitoring and Analytics/NORTE-01-0145-FEDER-000016” is financed by the North Portugal Regional Operational Programme (NORTE 2020), under the PORTUGAL 2020 Partnership Agreement, and through the European Regional Development Fund (ERDF). João M. Maia acknowledges the support of the Foundation for Science and Technology (FCT), Portugal through the Investigation Grant PD/BI/128995/2017.


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Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • João M. Maia
    • 1
    • 3
    Email author
  • Vítor A. Amorim
    • 1
    • 3
  • D. Alexandre
    • 2
    • 3
  • P. V. S. Marques
    • 1
    • 3
  1. 1.Department of Physics and AstronomyFaculty of Sciences of University of PortoPortoPortugal
  2. 2.Department of PhysicsUniversity of Trás-os-Montes e Alto DouroVila RealPortugal
  3. 3.CAP - Centre for Applied PhotonicsINESC TECPortoPortugal

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