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Commentary—Are There Still Places for Gallium FIB?

Conference paper
Part of the The Minerals, Metals & Materials Series book series (MMMS)

Abstract

Since developed in the mid-1980s, focused ion beam (FIB) technology has become quite mature. From the initial single Ga ion beam system to nowadays dual-beam FIB, and from application only in semiconductor industry to applications to biological, mineral and materials engineering, FIB systems seemed to have almost maxed out their capability. The question arises is if the Ga FIB will still hold its place after the release of the new generation of plasma FIB in 2015. This paper provides a high-level overview of the two FIB systems.

Keywords

FIB Microscopy Milling PFIB LMIS Resolution 

Notes

Acknowledgements

The authors would like to thank financial support from Her Majesty the Queen in Right of Canada, as represented by the Minister of Natural Resources.

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Copyright information

© The Minerals, Metals & Materials Society 2019

Authors and Affiliations

  1. 1.CanmetMATERIALSNatural Resources CanadaHamiltonCanada

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