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Closed-Loop Temperature Control CMOS Integrated Circuit for Diagnostics and Self-calibration of Capacitive Humidity Sensors

  • Moataz Elkhayat
  • Stefano Mangiarotti
  • Marco GrassiEmail author
  • Piero Malcovati
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 539)

Abstract

A temperature control loop for capacitive humidity sensors has been developed in 0.35 µm CMOS technology and characterized with experimental lab measurements. The proposed circuit is employed for self-diagnostics of the humidity sensor as well as for auto-calibration, thanks to correlation between relative humidity and temperature. An input Switched-Capacitor (SC) thermometer read-out circuit compares the measured temperature value with a setpoint while a SC PWM PI circuit drives a power n-MOS to deliver heat to the sensor. Measurements results summary is reported. The temperature loop accuracy is ±0.25 ℃ in a range from room temperature to 50 ℃, while consuming 0.9 mA from a single 3.3 V supply for the control and about 43 mW for delivering heating power.

Keywords

Auto-Diagnostics Capacitive humidity sensor Temperature control loop Self-Calibration 

References

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    Lazarus, N., et al.: CMOS-MEMS capacitive humidity sensor. J. Microelectromech. Syst. 19(1), 183–191 (2010)CrossRefGoogle Scholar
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    Elkhayat, M., Mangiarotti, S., Grassi, M., Malcovati, P., Fornasari, A.: Capacitance humidity micro-sensor with temperature controller and heater integrated in CMOS technology. In: CNS 2016 Proceedings, Lecture Notes in Electrical Engineering, pp. 383–387. Springer (2017)Google Scholar

Copyright information

© Springer Nature Switzerland AG 2019

Authors and Affiliations

  • Moataz Elkhayat
    • 1
  • Stefano Mangiarotti
    • 1
  • Marco Grassi
    • 1
    Email author
  • Piero Malcovati
    • 1
  1. 1.Department of Electrical, Computer, and Biomedical EngineeringUniversity of PaviaPaviaItaly

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