Deflection Angle Detection of the Rotor and Signal Processing for a Novel Rotational Gyroscope
Differential capacitance detection, a common high resolution proof mass displacement detection scheme, is adopted in the gyroscope to measure the rotor deflection angle by installing an electrode with four poles under the rotor disk, which forms four detection capacitors and opposite ones form a differential capacitance detection pair. Theoretical inference explains the approximately proportional relationship between the capacitance difference and the rotor deflection angle. Simulation in Ansys Maxwell verifies the inference and confirms the differential capacitance detection range of the rotor deflection angle to 0–1°, limited by linearity. A signal processing system is constructed, obtaining a DC output voltage proportional to the measured input angular speed. Experiment shows the fabricated gyroscope with the designed differential capacitance detection pairs exhibits excellent performance with the resolution and the bias stability of 0.1 °/s and 0.5 °/h, respectively.
KeywordsRotational gyroscope Differential capacitance detection pair
The work presented in this paper was supported by National Nature Science Foundation of China under Grant No. 91438205.
- 5.Elsayed, M., Nabki, F., Sawan, M., El-Gamal, M.: A 5 V MEMS gyroscope with 3 aF/°/s sensitivity, 0.6°/√hr mechanical noise and drive-sense crosstalk minimization. In: Proceedings of the 2011 International Conference on Microelectronics (ICM), Hammamet, Tunisia, 19–22 December 2011, pp. 1–5 (2011)Google Scholar
- 7.Wu, H.M., Yang, H.G., Yin, T., Zhang, H.: Stability analysis of MEMS gyroscope drive loop based on CPPLL. In: Proceedings of the 2011 Asia Pacific Conference on Microelectronics and Electronics, Macao, China, 6–7 October 2011, pp. 45–48 (2011)Google Scholar
- 8.Mo, B., Liu, X.W., Ding, X.W., Tan, X.Y.: A novel closed-loop drive circuit for the micromechined gyroscope. In: Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, Harbin, China, 5–8 August 2007, pp. 3384–3390 (2007)Google Scholar
- 10.Fang, R., et al.: A control and readout circuit with capacitive mismatch auto-compensation for MEMS vibratory gyroscope. In: Proceedings of the 11th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT), Xi’an, China, 29 October–1 November 2012, pp. 1–3 (2012)Google Scholar
- 12.Cui, J., Chi, X.Z., Ding, H.T., Lin, L.T., Yang, Z.C., Yan, G.Z.: Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes. J. Micromech. Microeng. 12, 1–17 (2009)Google Scholar
- 13.Yang, B., Zhou, B.L., Wang, S.R.: A precision closed-loop driving scheme of silicon micromachined vibratory gyroscope. J. Phys: Conf. Ser. 34, 57–64 (2006)Google Scholar
- 14.Xiao, Q., Luo, Z.: Initial levitation of micromachined electrostatically suspended gyroscope with fuzzy hybrid PI controller. In: Proceedings of the International Conference on Control, Automation, Robotics & Vision, Phuket, Thailand, 13–15 November 2016 (2016)Google Scholar