Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures

Chapter
Part of the Springer Series in Advanced Manufacturing book series (SSAM, volume 0)

Abstract

Nanostructures with dimensions on the order of 1 to 100 nm represented by the nanoedge of a single point diamond cutting tool can be made by nanomanufacturing. The diamond cutting tool is used in ultra-precision cutting to fabricate precision workpieces [1–5]. As shown in Figure 9.1, the tool has a very sharp edge with a radius on the order of 10 to 100 nm. The micro/nanowear of the tool edge poses a large problem because it influences the quality of the machined surface [6]. Diamond cutting has also been used to generate three-dimensional (3D) micro-structured surfaces. In such cases, the fabrication accuracy is influenced not only by the tool edge sharpness, but also by the local 3D profile of the tool edge [7]. Therefore, it is important to conduct precision nanometrology of the edge wear as well as the 3D edge profile.

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