SEM images that show the spatial distribution of the elemental constituents of a specimen («elemental maps») can be created by using the characteristic X-ray intensity measured for each element with the energy dispersive X-ray spectrometer (EDS) to define the gray level (or color value) at each picture element (pixel) of the scan. Elemental maps based on X-ray intensity provide qualitative information on spatial distributions of elements. Compositional mapping, in which a full EDS spectrum is recorded at each pixel («X-ray Spectrum Imaging» or XSI) and processed with peak fitting, k-ratio standardization, and matrix corrections, provides a quantitative basis for comparing maps of different elements in the same region, or for the same element from different regions
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