Scanning Probe Microscopy

  • D. A. Grigg
  • P. E. Russell
Chapter

Abstract

Several techniques have been developed over the past decade using near-field effects to obtain high-resolution microscopic images and surface microanalysis. These techniques are referred to as scanning probe microscopies (SPM). In each of these microscopies, a sharpened probe is used to measure a specific interaction between the probe and the surface of interest. The instrument which began this new and expanding field of microscopy is the scanning tunneling microscope (STM) invented in 1981 by Binnig, Rohrer, and coworkers (1982a–c). The STM measures the electronic interaction between a conductive or semiconductive probe and sample which allows the direct imaging of geometric and electronic surface structure with atomic resolution. Several reviews of the STM literature have been published (Golovchenko, 1986; Hansma and Tersoff, 1987; Binnig and Rohrer, 1987; Kuk and Silverman, 1989; Demuth et al., 1988; Griffith and Kochanski, 1990).

Keywords

Beam Splitter Scan Probe Microscopy Scanning Electron Microscope Tunneling Current Vibration Isolation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Copyright information

© Springer Science+Business Media New York 1994

Authors and Affiliations

  • D. A. Grigg
    • 1
  • P. E. Russell
    • 1
  1. 1.Department of Materials Science and EngineeringNorth Carolina State UniversityRaleighUSA

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