Microwave Discharges pp 85-94 | Cite as
Strongly Damped Surface Waves in Plasmas
Chapter
Abstract
Plasma sources which are sustained by the electromagnetic fields of surface waves have attracted considerable interest in recent years. Experimental techniques have been developed to produce plasmas under a wide range of conditions1,2, supported by extensive numerical modelling3,4,5,6 which has been used to interpret experimental results7,8,9,10 Much of this work is described elsewhere in this volume. In surface wave discharges (SWD), the wave is damped by collisions between electrons and background atoms, leading to an inhomogeneous density profile in the direction of propagation of the wave.
Keywords
Dispersion Relation Surface Wave Light Output Discharge Parameter Radial Density
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