Phase Identification Using Electron Backscatter Diffraction in the Scanning Electron Microscope
The identification of unknown micrometer-sized phases in the scanning electron microscope (SEM) has been limited by the lack of a robust and simple way to obtain crystallographic information about the unknown while observing the microstructure or morphology of the specimen. Electron backscatter diffraction (EBSD) is a technique that can provide identification of unknown crystalline phases while exploiting the excellent imaging capabilities of the SEM. Previous to the development of EBSD for phase identification, the only applicable technique for the identification of micrometer-sized phases was electron diffraction in the transmission electron microscope (TEM). Convergent beam and selected area electron diffraction (CBED and SAED) can provide information from submicrometer sized phases, but require the preparation of electron transparent samples that is very difficult and time intensive. Phase identification using EBSD is a complementary technique to TEM methods.
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