Changes of Electrical Properties of Silicon Caused by Plastic Deformation
Chapter
Abstract
When the interest in the electrical properties of dislocations in semiconductors started some 30 years ago plastic deformation was just a technique to introduce a dislocation density into the crystal sufficient high for producing measurable effects.
Keywords
Electron Paramagnetic Resonance Point Defect Electron Paramagnetic Resonance Spectrum Screw Dislocation Electron Paramagnetic Resonance Signal
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© Plenum Press, New York 1989