Introduction to Secondary Ion Mass Spectrometry (SIMS)

  • H. W. Werner
Chapter
Part of the NATO Advanced Study Institutes Series book series (NSSB, volume 32)

Abstract

This contribution aims to give to the beginner in SIMS a survey of the present state of our knowledge of secondary ion emission, of basic experimental embodiment of today’s SIMS instruments and of the potential of this method for research and as an analytical tool.

Keywords

Erosion Rate Bombardment Time Extraction Electrode Fingerprint Spectrum Pulse Counting Mode 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Copyright information

© Plenum Press, New York 1978

Authors and Affiliations

  • H. W. Werner
    • 1
  1. 1.Philips Research LaboratoriesEindhovenThe Netherlands

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